Microwave Phase Control for Plasma Mode Jump Suppression

The microwave transmitting member is divided into multiple independent microwave introduction regions, each capable of introducing microwaves separately. This segmentation allows each region to maintain continuous electron density while collectively covering a large area, thus preventing mode jump while reducing the need for multiple separate transmitting members.

Each microwave introduction region is designed with specific local characteristics optimized for its position and function. The regions can have different geometries, sizes, and microwave transmission properties tailored to their local requirements, ensuring uniform plasma generation across the entire large area while maintaining continuous electron density in each local region.

The large microwave transmitting member is segmented into multiple smaller microwave introduction regions distributed across the surface. Each segment independently generates plasma with continuous electron density, and the collective effect covers the entire large workpiece area, thus achieving both large area coverage and electron density continuity.

The system dynamically controls the microwave introduction in each region to ensure continuous plasma generation. By coordinating the microwave power and timing across multiple regions, the system maintains continuous electron density throughout the large processing area, preventing mode jump even as the workpiece size increases.