Mie Photo Sensor Resonance for Small-Pixel Imaging

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional photo sensors face challenges in reducing pixel size while maintaining image quality due to limitations in signal-to-noise ratio, dynamic range, depth of field, and depth of focus, as they operate at size scales where sensor elements are much larger than light wavelengths, leading to deteriorated performance with smaller sizes.

Innovation Solution

The development of Mie photo sensors, which utilize Mie scattering to concentrate light internally, allowing for increased light sensitivity and improved image generation characteristics by creating large in-particle fields with enhanced absorption probabilities, thus overcoming the thickness requirements of conventional photo sensors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional photo sensors are reduced in size to decrease pixel dimensions, then the sensor size is reduced, but the signal-to-noise ratio deteriorates

Engineering Contradiction:
Improvesensor sizeVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent changes the operating regime from conventional refraction-based detection to Mie scattering-based detection. By operating in the Mie scattering regime where particle size is comparable to the wavelength of light, the sensor achieves enhanced light-matter interaction and improved signal-to-noise ratio even at reduced sizes. This parameter change in the fundamental detection mechanism enables smaller sensor dimensions without sacrificing detection quality.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent utilizes optical resonance and Mie scattering modes, which are forms of electromagnetic vibration, to enhance light absorption and carrier generation. The resonant oscillations of the electromagnetic field within the sensor material increase the effective interaction time and probability of photon absorption, thereby improving signal generation efficiency in smaller sensor volumes.

Inventive Principle:
Principle #18Mechanical vibration

2Volume of moving object

If conventional photo sensors are reduced in size to decrease pixel dimensions, then the sensor size is reduced, but the dynamic range deteriorates

Engineering Contradiction:
Improvesensor sizeVSAvoiddynamic range
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent transitions from Beer-Lambert absorption law to Mie scattering theory, fundamentally changing the optical interaction parameters. This enables the sensor to maintain broad spectral response and dynamic range capabilities at smaller sizes by exploiting size-dependent scattering resonances that enhance light absorption across multiple wavelengths simultaneously.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite structures combining semiconductor materials with specific refractive indices and absorption coefficients optimized for Mie scattering. This composite approach enables tailored optical responses that maintain dynamic range while reducing sensor size, as the material composition can be optimized for specific wavelength ranges and scattering characteristics.

Inventive Principle:
Principle #40Composite materials

3Volume of moving object

If conventional photo sensors are reduced in size to decrease pixel dimensions, then the sensor size is reduced, but the depth of field deteriorates

Engineering Contradiction:
Improvesensor sizeVSAvoiddepth of field
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent changes the fundamental optical interaction from refraction-dominated to scattering-dominated regime. Mie scattering has different depth-of-field characteristics compared to conventional refraction-based detection, enabling improved depth of field performance in miniaturized sensors by exploiting the wave nature of light and resonant scattering effects that are less sensitive to focal plane variations.

Inventive Principle:
Principle #35Parameter changes

4Volume of moving object

If conventional photo sensors are reduced in size to decrease pixel dimensions, then the sensor size is reduced, but the depth of focus deteriorates

Engineering Contradiction:
Improvesensor sizeVSAvoiddepth of focus
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent transitions to Mie scattering-based detection where the interaction length and absorption probability are enhanced by resonant scattering modes. This enables smaller sensor thicknesses to achieve sufficient light absorption and carrier generation, thereby improving depth of focus performance in miniaturized sensors by reducing the focal plane tolerance requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Mie photo sensors achieve improved image generation with increased light sensitivity and dynamic range, enabling smaller pixel sizes without compromising image quality, and can be implemented in arrays with reduced thickness, enhancing spatial resolution and reducing power consumption.

Implementation Method 1

A Mie photo sensor leverages Mie scattering to generate improved photo currents relative to conventional photo sensor technologies as described herein

Methodology Applied
Scientific EffectMie scattering: Scattering

Implementation Method 2

the electromagnetic scattering center comprises some portion (or all) of semiconducting material of the mesa configured for generating free carriers via optical absorption and Mie resonance of the electromagnetic perturbation at the scattering center

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Implementation Method 3

generating free carriers via optical absorption and Mie resonance of the electromagnetic perturbation at the scattering center

Methodology Applied
Scientific EffectMie resonance: Resonance

Data Source

PatentEP3841616B1High information content imaging using mie photo sensors
Publication Date: 2024.12.04 PIXELEXX SYSTEMS INC
  • EP3841616B1 patent drawingFigure 1A~1B
  • EP3841616B1 patent drawingFigure 1C~1D
  • EP3841616B1 patent drawingFigure 1E~1F

AI summary

A Mie photo sensor is described. A Mie photo sensor is configured to leverage Mie scattering to implement a photo sensor having a resonance. The resonance is based on various physical and material properties of the Mie photo sensor. In an example, a Mie photo sensor includes a layer of semiconductor material with one or more mesas. Each mesa of semiconductor material may include a scattering center. The scattering center is formed by the semiconductor material of the mesa being at least partially surround by a material with a different refractive index than the semiconductor material. The abutting refractive index materials create an interface that forms a scattering center and localizes the generation of free carriers during Mie resonance. One or more electrical contacts may be made to the mesa to measure the electrical properties of the mesa.