Miniature Fiber Optic Coupler for Swappable End Effector Arms
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Solution Overview
Problem
Current wafer handling systems in semiconductor processing face challenges with the costly and time-consuming process of swapping fiber optics due to their small size and embedded nature, necessitating frequent changes in end effector arms, which complicates quick disconnection and realignment.
Innovation Solution
A miniature fiber optic coupler with dimensions of less than 4 mm×4 mm×4 mm, incorporating sending and receiving line prisms at 30 to 60-degree angles, allows for easy connection and disconnection of fiber optics, enabling rapid switch-outs and integration into end effector arms without modifying their size or thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If fiber optics are embedded in end effector arms for tip mapping, then sensing capability is improved, but swapping and realignment becomes time-consuming and costly
Solution Approach 1:
The fiber optic system is segmented into modular components: a connector portion that remains in the base and a corresponding receptacle in the arm. This segmentation allows the arm to be swapped without the fiber optics, eliminating the time-consuming process of disconnecting and realigning embedded fibers while maintaining tip mapping capability through the modular connector-receptacle interface.
2Measurement precision
If fiber optics are made very small (1 mm scale) for precision, then sensing accuracy is improved, but disconnection and realignment becomes difficult
Solution Approach 1:
A connector serves as an intermediary component that interfaces with the small (1 mm scale) fiber optic without requiring direct manipulation of the fiber itself. The connector provides a larger, easier-to-manage interface for connection and disconnection while the small fiber optic maintains its precision sensing capability through the connector-receptacle interface.
3Adaptability or versatility
If end effector arms are swapped frequently for different applications, then adaptability is improved, but fiber optic reconfiguration becomes costly and time-consuming
Solution Approach 1:
The connector-receptacle interface is designed as a universal system where a single connector type can interface with multiple arm types. This allows different end effector arms to be swapped without requiring custom fiber optic configurations for each arm, enabling frequent arm changes for different applications while eliminating the need for costly and time-consuming fiber optic reconfiguration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates expedited connection and disconnection of fiber optics, allowing for efficient assembly, disassembly, and modification of end effector arms in semiconductor processing environments, reducing downtime and costs associated with fiber optic swaps.
Implementation Method 1
a sending line prism having dimensions of less than 2 mm×2 mm within the housing in optical communication with the sending line; a receiving line prism having dimensions of less than 2 mm×2 mm in optical communication with the sending line prism at a corresponded angle in a range of 30 to 60 degrees and capable of receiving a signal incoming on the sending line and redirecting the received signal
Data Source
AI summary
An apparatus, system and method for providing an optical coupler. The optical coupler may be a miniature fiber optic coupler, which may include: a housing having dimensions of less than 4 mm×4 mm×4 mm; an input into the housing capable of receiving a fiber optic sending line; a sending line prism having dimensions of less than 2 mm×2 mm within the housing in optical communication with the sending line; a receiving line prism having dimensions of less than 2 mm×2 mm in optical communication with the sending line prism at a corresponded angle in a range of 30 to 60 degrees and capable of receiving a signal incoming on the sending line and redirecting the received signal; and a receiving line in optical communication with the receiving line prism and capable of receiving and outputting the redirected received signal.