Mist Heating Section Coating for Film Formation Apparatus
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Solution Overview
Problem
Film formation apparatuses using mist chemical vapor deposition face challenges in suppressing mist condensation and aggregation in the supply path, leading to decreased film quality due to adherent deposits and reduced heat transmission over repeated use.
Innovation Solution
A film formation apparatus with a mist heating section where the inner surface of the supply path is coated with a layer containing oxides or hydroxides of elements present in the mist, maintaining infrared radiation and reducing deposit adhesion, thus stabilizing the temperature of the mist supplied to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the supply path is heated to suppress mist condensation and aggregation, then the amount of mist supplied to the substrate increases and film formation speed improves, but deposits adhere to the inner surface of the supply path and heat transmission decreases over repeated use
Solution Approach 1:
The patent applies preliminary action by forming a coating layer on the inner surface of the supply path before actual film formation begins. This coating layer is created by supplying mist to the heated supply path in advance, allowing the coating to form and stabilize heat transmission properties before production starts, thereby preventing the deterioration that would otherwise occur during repeated use
Solution Approach 2:
The patent changes the physical and chemical parameters of the supply path inner surface by coating it with a layer containing oxides or hydroxides of elements present in the mist. This parameter change modifies the surface properties to maintain consistent heat transmission and prevent deposit adhesion, resolving the reliability issue while preserving the productivity benefits of heating
2Quantity of substance
If the supply path is heated to prevent mist condensation, then mist aggregation is suppressed and more mist reaches the substrate, but the inner surface of the supply path accumulates deposits that reduce heat transmission over time
Solution Approach 1:
The patent uses preliminary action by pre-forming a coating layer on the supply path inner surface before actual production. This preliminary coating prevents subsequent deposit accumulation that would otherwise occur during repeated heating operations, thereby maintaining consistent film quality while continuing to suppress mist condensation and aggregation
Solution Approach 2:
The patent effectively creates a disposable or replaceable coating layer that protects the supply path. This coating layer can be formed anew by repeating the preliminary process when needed, similar to replacing consumable parts, ensuring consistent manufacturing precision without requiring replacement of the entire supply path
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains optimal film formation conditions over a longer period by minimizing the decrease in heat transmission and preventing film quality deterioration, ensuring consistent film quality by stabilizing the temperature of the mist.
Implementation Method 1
The part of the supply path heated by the heater is provided as a mist heating section in which infrared rays are radiated from an inner surface of the supply path toward the mist
Implementation Method 2
The inner surface of the supply path in the mist heating section is coated with a coating layer containing at least one of an oxide and a hydroxide of an element present in the mist
Data Source
AI summary
A film formation apparatus includes a stage for having a substrate thereon; a mist generation source that generates a mist of a solution containing at least water and in which a material for forming a film on the substrate is dissolved; a supply path that conveys the mist toward the substrate on the stage by a flow of a carrier gas; and a heater that heats at least a part of the supply path. The part of the supply path heated by the heater is provided as a mist heating section in which infrared rays are radiated from an inner surface of the supply path toward the mist. The inner surface of the supply path in the mist heating section is coated with a coating layer containing at least one of an oxide and a hydroxide of an element present in the mist.