MMIC Heat Sink Segmentation to Suppress Waveguide Modes

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Solution Overview

Problem

Monolithic microwave integrated circuits (MMICs) face unwanted amplifier oscillations due to waveguide modes generated by the metalized surfaces acting as a two-conductor, parallel plate system, which disrupts proper circuit operation, especially when the resonance frequency aligns with the amplifier's frequency of operation.

Innovation Solution

A monolithic microwave integrated circuit structure is designed with a thermally conductive heat sink and a metal layer on the top surface, where the heat sink and metal layer do not overlay the input and output sections of the coplanar waveguide transmission line, and additional ground bumps are strategically placed to suppress these modes by avoiding strong field interfaces and maintaining symmetry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the bottom side of the CPW MMIC is metalized to attach a heat sink, then heat dissipation is improved, but waveguide modes are generated that cause unwanted amplifier oscillation

Engineering Contradiction:
Improveheat dissipationVSAvoidunwanted amplifier oscillation
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The ground plane is segmented into multiple isolated ground regions rather than a continuous plane. This segmentation breaks the parallel plate waveguide structure that supports harmful waveguide modes, while still providing adequate heat sinking through the distributed ground regions and heat sink attachment points.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The ground plane structure is made non-uniform with different regions having different properties. Some regions provide heat sinking functionality while others are optimized to suppress waveguide modes. The ground plane includes both continuous and discontinuous sections to simultaneously achieve thermal management and electromagnetic compatibility.

Inventive Principle:
Principle #3Local quality

2Temperature

If a continuous ground plane is used for heat sinking, then thermal management is improved, but coupling between input and output sections increases causing oscillation

Engineering Contradiction:
Improvethermal managementVSAvoidcoupling between input and output
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The ground plane is divided into separate ground regions that are electrically isolated or weakly coupled. This prevents strong electromagnetic coupling between input and output sections while maintaining thermal conduction paths to the heat sink. The segmentation breaks the feedback loop that causes oscillation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Dielectric materials and structural features are introduced as intermediaries between the ground plane regions and the active devices. These intermediaries reduce electromagnetic coupling while allowing thermal management to function through the heat sink attachment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses unwanted oscillations by reducing coupling and increasing the resonance frequency, resulting in improved isolation within the frequency band of interest, while still providing adequate heat sinking.

Implementation Method 1

a heat sink disposed over the top surface of the substrate structure

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

this added metalized surface, in conjunction with the topside metal used for the ground plane of the CPW, forms a two-conductor, parallel plate, system that can support waveguide modes

Methodology Applied
Scientific EffectWaveguide mode: Waveguide

Implementation Method 3

If the resonance frequency associated with this mode falls within the frequency of operation of the amplifier circuit

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 4

One type of microwave transmission line is coplanar waveguide (CPW) transmission line

Methodology Applied
Scientific EffectCoplanar waveguide: Waveguide

Data Source

PatentEP2614524B1Monolithic microwave integrated circuit
Publication Date: 2021.09.29 RAYTHEON CO
  • EP2614524B1 patent drawingFigure 1
  • EP2614524B1 patent drawingFigure 2
  • EP2614524B1 patent drawingFigure 3

AI summary

A monolithic microwave integrated circuit structure having a semiconductor substrate structure with a plurality of active devices and a microwave transmission line having an input section, an output section and a interconnecting section electrically interconnecting the active devices on one surface and a metal layer as well as a heat sink on an opposite surface overlaying the interconnection section and absent from overlaying the input section and the output section.