Mode-Matched MEMS Gyroscope for Multi-Axis Rotation Sensing
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Solution Overview
Problem
Existing MEMS-based Coriolis vibratory gyroscopes typically require multiple sensors or devices with different sensitivities to track angular rotations in multiple directions, limiting their miniaturization and increasing cost and complexity.
Innovation Solution
A multi-mode, mode-matched MEMS-based Coriolis vibratory gyroscope that operates in a single frequency for both drive and sense modes, utilizing a resonating proof mass, comb capacitors, and serpentine springs to detect angular rotations in multiple orthogonal directions, reducing the need for multiple sensors and improving sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple sensors or devices with different sensitivities are used to track angular rotations in multiple directions, then measurement capability in multiple directions is improved, but device complexity and cost increase
Solution Approach 1:
The patent implements a single gyroscope device that can detect angular rotations about multiple orthogonal axes (X, Y, and Z axes) simultaneously. The proof mass is configured to vibrate in multiple modes, with each mode sensitive to rotation about a different axis. This multi-functional capability eliminates the need for multiple separate sensors, directly resolving the contradiction between measurement capability and device complexity
Solution Approach 2:
The patent segments the sensing function into multiple independent vibration modes within a single device. Each vibration mode (e.g., X-direction vibration sensitive to Y-axis rotation, Y-direction vibration sensitive to X-axis rotation) acts as an independent sensing channel. This segmentation allows one device to perform the function of multiple devices while maintaining the ability to measure multiple rotational axes
2Measurement precision
If multiple sensors are used to track angular rotations in multiple directions, then measurement capability is improved, but miniaturization is limited
Solution Approach 1:
The patent merges multiple sensing functions into a single integrated gyroscope structure. The proof mass serves multiple vibration modes simultaneously, with each mode providing sensitivity to a different rotational axis. This merging of functions into one compact device enables multi-directional rotation detection while achieving miniaturization, directly addressing the contradiction between measurement capability and device volume
3Measurement precision
If sensors with different sensitivities to each direction are used, then directional measurement capability is improved, but device complexity increases
Solution Approach 1:
The patent applies local quality by configuring different regions of the proof mass with different vibration mode characteristics. Each region or mode is optimized for sensitivity to a specific rotational axis. For example, the proof mass geometry and support structure are designed so that X-direction vibrations are primarily sensitive to Y-axis rotations, while Y-direction vibrations are primarily sensitive to X-axis rotations. This localized optimization within a single device achieves directional sensitivity without increasing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables consistent sensitivity across multiple axes, allowing for miniaturization and reduced cost by integrating multiple sensing functions into a single device, with improved detection of angular inertia and reduced noise performance.
Implementation Method 1
vibratory gyroscopes that leverage the Coriolis Effect to accurately measure angular rotation in multiple dimensions
Implementation Method 2
a plurality of comb capacitors, each coupled to one of the plurality of side surfaces, and configured to provide an in-plane sense metric while operating at the mode-matched frequency
Implementation Method 3
a plurality of serpentine springs configured to facilitate translational motion of the proof mass in directions substantially perpendicular to the top surface
Data Source
AI summary
A multi-mode, mode-matched, mems-based Coriolis vibratory gyroscope. A vibratory gyroscope apparatus, comprising a resonating proof mass having a top surface and a plurality of side surfaces substantially perpendicular to the top surface, wherein the proof mass is configured to facilitate in-plane motion at a mode-matched frequency, a plurality of comb capacitors, each coupled to one of the plurality of side surfaces, and configured to provide an in-plane sense metric while operating at the mode-matched frequency, and a plurality of serpentine springs configured to facilitate translational motion of the proof mass in directions substantially perpendicular to the top surface. Additionally, the apparatus may further comprise a gyroscope controller configured to receive, measure, and/or adjust the control signal for a plurality of sense modes, an actuator electrically coupled to the proof mass, and a plurality of electrodes each electrically coupled to each of the plurality of comb capacitors.