Modular Electrode Device for Uniform Plasma Distribution
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Solution Overview
Problem
Current modularized linear-plasma apparatuses face challenges in handling large-size base plates due to the high cost and scarcity of large-size heat-resistant insulating materials, complexity in manufacturing, and uneven plasma distribution, limiting their applicability to direct-type plasma processing.
Innovation Solution
A modular electrode device comprising main bodies, first and second electrodes, connecting members, and beam bodies, allowing for serial extension and even plasma distribution, which can be applied to various base plate sizes without requiring expensive large-size heat-resistant materials, and enabling flexible plasma management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a mega linear plasma processing apparatus is designed to handle large-size base plates, then the processing capability is improved, but the cost and manufacturing complexity increase due to the need for large-size heat-resistant insulating materials
Solution Approach 1:
The electrode is divided into multiple modular segments that can be assembled together to form a mega electrode for large-size base plates. Each segment contains its own insulating structure, eliminating the need for a single large-size heat-resistant insulating material. This segmentation approach maintains processing capability while reducing manufacturing complexity and cost.
2Area of stationary object
If the number of electrode sources is extended to meet the size requirement for mega base plates, then the processing area is improved, but the plasma distribution becomes uneven
Solution Approach 1:
Multiple electrode segments are electrically connected in parallel through connecting members to function as a single unified mega electrode. This merging approach ensures uniform plasma distribution across the entire processing area, avoiding the uneven plasma distribution that occurs when electrode sources are simply extended in series.
3Temperature
If cooling water channels are constructed in a long electrode to stabilize temperature, then the temperature stability is improved, but the construction difficulty increases
Solution Approach 1:
The cooling water system is segmented into multiple independent channels, with each electrode segment containing its own cooling channels. This segmentation simplifies the construction process compared to creating a single continuous cooling system for a long electrode, while still maintaining temperature stability across the entire electrode assembly.
4Area of moving object
If parallel plasma sources are arranged in a linear manner, then the processing width is improved, but the plasma distribution becomes uneven limiting application to direct-type plasma only
Solution Approach 1:
Multiple parallel electrode segments are electrically connected in parallel to function as a single integrated electrode. This merging approach ensures uniform plasma distribution across the expanded processing width, enabling application to both direct-type and indirect-type plasma processes, unlike simple parallel arrangements that produce uneven distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design allows for flexible and even plasma distribution across different base plate sizes, reducing manufacturing complexity and costs, and enabling efficient surface treatment and coating processes without the need for expensive large-size heat-resistant materials.
Implementation Method 1
a plurality of parallel plasma source is arranged in a linear manner, and the corresponding electrodes are parallel connected, such that individual plasma sources can produce a series of parallel plasmas by introducing respective process gases
Data Source
AI summary
A modular electrode device comprises a plurality of main bodies, a first electrode, at least one second electrode, at least one first connecting member and two second connecting members. Each main body has a side edge, an internal chamber and a gas inlet communicative in space between the chamber and the atmosphere. The first electrode is mounted at the side edge of one main body, while the in-serial second electrodes connected to one end of the first electrode are mounted at the side edges of the other main bodies. The main bodies are separated by the parallel third electrodes. The third, the second and the third electrodes are connected to each other. The first connecting member bridges in-serially the first electrode and the neighboring second electrode. The second connecting members are applied to both opposing end of the in-serial combination of the first and the second electrodes.