Modular Gas Pallet Assemblies for Compact CMP Cleaning Units
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Solution Overview
Problem
The existing cleaning units in chemical mechanical polishing (CMP) systems face space limitations, leading to challenges in substrate transfer, increased oxidation and contamination risks, and difficulties in maintaining and expanding gas delivery systems due to compact module arrangements.
Innovation Solution
The implementation of modular gas pallet assemblies and a cleaning unit design that allows for stacked gas pallets beneath cleaning modules, enabling easy servicing and expansion while maintaining operational efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If modules within a cleaning unit are arranged as closely together as possible to reduce space, then the footprint and air exposure time are reduced, but the gas delivery system becomes difficult to maintain and service
Solution Approach 1:
The gas delivery system is segmented into modular gas pallet assemblies that can be independently removed and serviced. Each gas pallet is a self-contained module with its own gas distribution manifold, allowing maintenance without disrupting the entire cleaning unit operation.
Solution Approach 2:
The gas pallet assemblies are positioned within the cleaning unit enclosure, nesting the gas delivery infrastructure within the existing space. This allows the gas system to be integrated into the compact cleaning unit design while maintaining accessibility for service through removable panels or openings.
2Area of stationary object
If modules are compacted to save space, then the cleaning unit footprint is reduced, but expansion and replacement capabilities are lost
Solution Approach 1:
The gas pallet assemblies are designed with dynamic configurability, allowing the number and arrangement of gas pallets to be adjusted based on process requirements. Additional gas pallets can be added or removed from the modular assembly without redesigning the entire gas delivery system.
Solution Approach 2:
The modular gas pallet design provides universal applicability across different cleaning module configurations. The same gas pallet assembly can be used in various positions and arrangements within the cleaning unit, enabling flexible adaptation to different process requirements while maintaining a compact footprint.
3Area of stationary object
If cleaning modules are arranged closely together, then space is optimized, but robot-like devices have little room to grasp and reorient substrates
Solution Approach 1:
The substrate transfer system utilizes vertical space and multi-axis motion to perform substrate manipulation within the compact horizontal footprint. Robot-like devices operate in three-dimensional space, grasping substrates and reorienting them through vertical and rotational movements rather than requiring large horizontal clearance.
4Volume of stationary object
If gas pallet assemblies are traditionally routed within the cleaning unit, then space is utilized, but the system lacks flexibility for future process changes
Solution Approach 1:
The gas delivery system is divided into discrete, independently controllable gas pallet assemblies. Each assembly can be selectively activated or deactivated based on process requirements, allowing flexible adaptation to different cleaning processes without reconfiguring the entire gas distribution network.
Data Source
AI summary
A modular gas pallet assembly is disclosed herein, along with a cleaning unit and chemical mechanical polisher having the same. In one example, the gas pallet assembly includes three outlets and two or less inlets. The gas pallet assembly has first and second primary gas conduits secured to a first mounting plate. The second primary gas conduits is split into two branches, each having their own flow control. The modular gas pallet assembly is configured to provide gas towards a base plate of a substrate cleaner, to substrate gripping pins of the substrate cleaner, and to a bottom of a substrate held by the substrate gripping pins of the substrate cleaner.