Modular Getter Assembly for Stable Vacuum Enclosures

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Solution Overview

Problem

Vacuum enclosures, particularly those for x-ray sources, face challenges in maintaining a stable vacuum level due to gas leakage and molecular contamination, which can be exacerbated by complex and costly electrical feedthroughs and potential arcing issues.

Innovation Solution

The implementation of modular getters with different materials and configurations, including extendible support structures, resilient components, and shields, allows for customizable gas capture and reduced electrical connections, minimizing vacuum leaks and arcing while maintaining vacuum integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If electrical feedthroughs are used to provide electrical connections in vacuum enclosures, then electrical functionality is achieved, but vacuum leakage and arcing risks increase

Engineering Contradiction:
Improvevacuum integrityVSAvoidvacuum leakage and arcing
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent removes electrical feedthroughs from the vacuum enclosure system entirely, extracting the harmful element that causes vacuum leakage and arcing. The getter unit is designed to provide electrical functionality (heating, monitoring) without requiring penetrations through the vacuum barrier, thus eliminating the source of vacuum degradation while maintaining necessary electrical capabilities through alternative means.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The system is divided into separate functional modules: the vacuum enclosure, the getter unit with its own support structure, and external control systems. This segmentation allows electrical connections to be made outside the vacuum boundary, preventing penetration points that would compromise vacuum integrity while still enabling electrical functionality through non-invasive coupling methods.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If multiple components and penetrations are used in vacuum enclosures, then functionality is enhanced, but vacuum stability deteriorates

Engineering Contradiction:
Improvefunctional capabilityVSAvoidvacuum stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The getter unit is designed as a multi-functional component that combines gas absorption, heating capability, and monitoring functions in a single integrated unit. This eliminates the need for multiple separate components and their associated mounting penetrations, thereby maintaining vacuum stability while achieving enhanced functionality through a unified, minimal-intrusion design.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Multiple functions (gas absorption, electrical heating, temperature monitoring) are merged into a single getter unit assembly. This consolidation reduces the total number of discrete components and their mounting requirements, minimizing penetrations into the vacuum enclosure and thereby preserving vacuum stability while delivering comprehensive functional capability.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If complex electrical feedthroughs are implemented, then electrical connections are achieved, but production and maintenance costs increase

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidproduction and maintenance cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The complex and expensive electrical feedthroughs are extracted from the vacuum enclosure system. Instead, simpler electrical connections are made to the getter unit through its support structure or external coupling mechanisms that do not require costly, complex feedthrough assemblies, thereby reducing both production and maintenance costs while maintaining reliable electrical functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The getter unit is designed as a replaceable, relatively simple component with basic electrical connections. Rather than investing in expensive, complex permanent feedthroughs, the system uses affordable, easily replaceable getter units that can be swapped out if needed, reducing overall system cost while maintaining electrical connection reliability during the operational lifetime of each getter.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances vacuum stability by reducing the number of components and penetrations, lowers production and maintenance costs, and maintains vacuum levels effectively, even with field emitters, by using multiple getters with varied activation temperatures and materials.

Implementation Method 1

Getters may be used to adsorb or absorb atoms and molecules that are produced to maintain the vacuum level

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

Getters may be used to adsorb or absorb atoms and molecules that are produced to maintain the vacuum level

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS12592354B2Modular getters and getters with different materials in vacuum enclosures
Publication Date: 2026.03.31 VAREX IMAGING CORP
  • US12592354B2 patent drawing
  • US12592354B2 patent drawing
  • US12592354B2 patent drawing

AI summary

Some embodiments include an apparatus, comprising: a vacuum enclosure including an opening; a support structure disposed in the vacuum enclosure, the support structure comprising: a first portion attached to the vacuum enclosure at the opening; and a second portion extending within the vacuum enclosure; and a plurality of getters disposed on the second portion of the support structure.