Modular MEMS Accelerometer Assembly for Cost Reduction
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Solution Overview
Problem
Conventional manufacturing techniques for micro electromechanical systems (MEMS) devices are extremely expensive and not amenable to configuration changes or economical production of small numbers of different device configurations due to their ultraminiature size and intricate fabrication requirements.
Innovation Solution
A MEMS acceleration detection device comprising a housing with a cavity and a spring mass system, where the spring mass system includes an annular ring and a central mass with a spring positioned between them, assembled into the cavity and enclosed by a lid, allowing for cost-effective production and design flexibility by utilizing common components across different designs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If wafer fabrication technology and photolithographic technology are used to produce MEMS devices, then manufacturing precision is improved, but manufacturing cost increases significantly
Solution Approach 1:
The device is divided into separate modular components: a housing, a spring-mass system, and a lid. These components can be manufactured independently using conventional techniques and then assembled, avoiding the need for expensive integrated wafer fabrication while maintaining precision through standardized interfaces and tolerances.
Solution Approach 2:
The housing and lid serve multiple functions: they contain the spring-mass system, provide hermetic sealing, and can be manufactured as universal components for different device configurations. This multi-functionality reduces the number of specialized manufacturing processes needed.
2Reliability
If wafer fabrication technology is used for MEMS devices, then device reliability is improved, but adaptability for configuration changes deteriorates
Solution Approach 1:
By segmenting the device into interchangeable modules (housing, spring-mass system, lid), different configurations can be achieved by assembling different components together. This maintains reliability through proven component designs while enabling adaptability for various applications.
Solution Approach 2:
The modular design allows the system to be dynamically reconfigured for different applications by changing which components are assembled together, rather than being fixed to a single configuration determined during fabrication.
3Ease of manufacture
If conventional manufacturing techniques are used for MEMS devices, then ease of manufacture is improved, but device complexity increases due to assembly requirements
Solution Approach 1:
While segmentation into modules simplifies manufacturing of individual components, the assembly process requires precise alignment and sealing. The design mitigates assembly complexity through features like interference fits, snap-fit mechanisms, and standardized sealing interfaces that guide proper assembly without requiring complex tooling or procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces production costs while maintaining reliability and allows for design variations, enabling the economical manufacture of MEMS devices with reduced complexity.
Implementation Method 1
spring mass system assembled into the cavity of the housing
Implementation Method 2
spring positioned between the ring and the central mass
Data Source
AI summary
A MEMS acceleration detection device including a housing having a cavity and a spring mass system assembled into the cavity of the housing. A lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.