Modular Multi-Axis Motor Drive Assembly for Precision Motion

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Solution Overview

Problem

Conventional electronic device manufacturing systems require complex and costly drive motors for robots to achieve precise and efficient multi-axis motion, limiting their applicability due to the need for specific motor designs for each robot configuration.

Innovation Solution

A modular multi-axis motor drive assembly comprising interchangeable motor modules with stator and rotor assemblies, including a vacuum barrier, allows for the assembly of 2-axis to 6-axis motors, enabling flexible and efficient robot arm motion in electronic device manufacturing systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional drive motors are used to achieve precise multi-axis motion, then motion precision is improved, but device complexity and cost increase

Engineering Contradiction:
Improvemotion precisionVSAvoidmotor complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent divides a multi-axis motor into multiple independent motor modules, where each module provides one axis of motion. This segmentation allows each module to be simpler in design while collectively achieving complex multi-axis motion capabilities, directly resolving the contradiction between precision and complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent designs universal motor modules that can be assembled in different configurations to create 2-axis, 3-axis, 4-axis, 5-axis, or 6-axis motors. Each module serves multiple potential functions depending on its assembly configuration, reducing overall system complexity while maintaining precision through standardized modular components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If conventional drive motors are used to achieve precise multi-axis motion, then motion precision is improved, but cost increases

Engineering Contradiction:
Improvemotion precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

By segmenting the multi-axis motor into identical or similar motor modules, the patent enables standardized manufacturing processes. Each module can be produced using the same tooling and procedures, significantly reducing manufacturing costs compared to custom-designed complex multi-axis motors, while maintaining precision through modular assembly.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent allows for the recovery and reuse of motor modules across different multi-axis motor configurations. A module from a disassembled motor can be recovered and reused in another configuration, reducing the need for new manufacturing and lowering overall system cost while maintaining precision specifications.

Inventive Principle:
Principle #34Discarding and recovering

3Manufacturing precision

If specific motor designs are used for each robot configuration, then adaptability is reduced, but manufacturing precision is improved

Engineering Contradiction:
Improverobot configuration precisionVSAvoidmotor configuration adaptability
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent creates universal motor modules that can be assembled into various multi-axis motor configurations (2-axis, 3-axis, 4-axis, 5-axis, or 6-axis). This universality allows the same basic module to adapt to different robot configurations while maintaining manufacturing precision through standardized interfaces and assembly procedures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent enables dynamic reconfiguration of motor systems by allowing modules to be assembled and disassembled according to specific robot configuration requirements. This dynamic adaptability permits the system to be tailored for precise manufacturing applications while maintaining versatility across different configurations.

Inventive Principle:
Principle #15Dynamics

4Device complexity

If modular motor modules are used, then device complexity is reduced, but vacuum sealing becomes more challenging

Engineering Contradiction:
Improvemotor assembly complexityVSAvoidvacuum contamination
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces vacuum barrier members as intermediary sealing components between motor modules. These specialized sealing elements mediate between the modular assembly requirements and vacuum sealing needs, allowing modules to be easily assembled while maintaining vacuum integrity and preventing contamination.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS9742250B2Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
Publication Date: 2017.08.22 APPLIED MATERIALS INC
  • US9742250B2 patent drawing
  • US9742250B2 patent drawing
  • US9742250B2 patent drawing

AI summary

Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in the stator housing, and a rotor assembly abutting the stator assembly, the rotor assembly including a rotor housing, a drive shaft, a bearing assembly supporting the drive shaft, and a rotor coupled to the drive shaft. A vacuum barrier member is positioned between the rotor and the stator. Multi-axis motor drive assemblies, multi-axis robot apparatus, electronic device manufacturing systems, and methods of assembling drive assemblies are described, as are numerous other aspects.