Modular Process Chamber for Wet Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing process chambers lack flexibility in treating substrates with different nominal dimensions and structures, requiring manual maintenance for soluble anodes and being limited to specific dimensions, which hampers efficient and automated production.
Innovation Solution
A modular process chamber design with separable upper and lower parts, allowing for adaptation to various substrate dimensions and structures, featuring exchangeable anodes and automated maintenance, enabling flexible treatment of substrates with different dimensions and structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the process chamber is designed with fixed dimensions optimized for a specific substrate size, then the treatment efficiency for that specific substrate is improved, but the adaptability to treat substrates with different dimensions deteriorates
Solution Approach 1:
The process chamber is divided into a lower part and an upper part that can be separated from each other. The upper part can be exchanged to adapt to different substrate dimensions, while the lower part remains fixed. This segmentation allows the chamber to maintain optimal treatment efficiency for specific substrate sizes while gaining versatility to treat various substrate types.
2Productivity
If soluble anodes are used in the process chamber, then the electrochemical plating process is improved, but the maintenance complexity and production interruptions increase due to periodic replenishment requirements
Solution Approach 1:
The process chamber is segmented into separable upper and lower parts, with the anode arrangement designed to facilitate easy access and replacement. The upper part can be removed to allow maintenance personnel to replenish soluble anodes without complex disassembly procedures, reducing maintenance complexity while maintaining the benefits of soluble anode electrochemical plating.
Solution Approach 2:
The design enables straightforward anode replenishment through simple access mechanisms, allowing the system to be easily maintained without requiring complex intervention or specialized procedures, thus reducing maintenance complexity while preserving electrochemical plating effectiveness.
3Manufacturing precision
If the upper opening dimensions are optimized for a specific substrate diameter, then the wet treatment uniformity is improved, but the versatility to treat substrates with different diameters deteriorates
Solution Approach 1:
The process chamber is divided into separable upper and lower parts, with the upper part containing the opening that contacts the substrate. By exchanging the upper part, the opening dimensions can be optimized for each specific substrate diameter to ensure uniform wet treatment, while the overall system maintains versatility to handle multiple substrate sizes.
4Device complexity
If the process chamber is designed as a single integrated unit, then the structural simplicity is improved, but the flexibility to adapt to different substrate dimensions and structures deteriorates
Solution Approach 1:
The process chamber is segmented into separable upper and lower parts that can be easily assembled and disassembled. This segmentation provides flexibility to adapt to different substrate dimensions by exchanging the upper part, while maintaining relative structural simplicity through a modular design that does not require complex mechanisms for assembly and disassembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and automated treatment of substrates with varying dimensions and structures, reducing maintenance costs and improving production flexibility by allowing automatic anode replacement and adaptation of the process chamber to different substrate sizes and layouts.
Implementation Method 1
the treatment liquid or electrolyte reaches it and wets it with it
Implementation Method 2
The flat material is positioned over the upper opening in such a way that the treatment liquid or electrolyte reaches it
Implementation Method 3
It is cathodically polarized on the underside by means of a rectifier and lower electrical contacts
Implementation Method 4
soluble anodes require periodic replenishment of the same in the process chamber
Data Source
Figure 1a~1c
Figure 2a~2c
Figure 3a~3c
AI summary
The invention relates to the wet processing and electroplating of one side and/or the edge of a flat product (1) used as a substrate in production systems containing process chambers (4), through which treatment liquid flows (8), wetting the product (1) that is positioned at the upper opening (3) of the process chamber (4). According to prior art, process chambers (4) of this type are suitable for one type of product (1) with particular dimensions. The invention provides the flexibility required in practice with respect to products (1) of different sizes. To achieve this, the process chamber (4) is designed in at least two parts with a lower part (5) and at least two upper parts (6) that can be preferably automatically interchanged. The separation point (7) of both parts is designed in a positive manner and can be automatically detached. Upper parts (6) that are adapted specifically to the product are placed on the fixed lower part (5) in order to produce the product, thus permitting the entire process chamber (4) to be optimised for the production of the designated type of product (1).