Modular Pulse Generator Coupling for Capacitive Plasma Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high voltage and current efficiently to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches and the need for high-frequency operation.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected through a coupling mechanism and controlled by a unit capable of rapid switching to produce step-function pulses, allowing for efficient charging and discharging of capacitive loads with sharp voltage transitions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and current pulses, then the power delivery capability is sufficient, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The patent divides a single high-power generator into multiple low-power generators, each operating within safe voltage limits. These modular units are connected in parallel through a coupling mechanism, allowing the system to deliver high total power while each individual switch operates at manageable voltage levels, thus resolving the contradiction between power delivery and voltage handling capability
2Reliability
If multiple low-power generators are used to stay within voltage limits, then the voltage handling capability is maintained, but the device complexity increases
Solution Approach 1:
The patent combines multiple low-power generators through a coupling mechanism that integrates their outputs. This merging approach allows the system to achieve high power delivery capability while maintaining manageable voltage levels at each component, effectively resolving the contradiction between reliability and device complexity by creating a scalable modular architecture
3Device complexity
If conventional generators are used, then the structure is simple, but the ability to deliver sharp voltage transitions and high-frequency pulses is limited
Solution Approach 1:
The patent introduces dynamic control of the coupling mechanism, allowing real-time adjustment of connections between low-power generators. This dynamic reconfiguration enables the system to deliver sharp voltage transitions and high-frequency pulses by selectively activating and deactivating generator connections, resolving the contradiction between structural simplicity and voltage transition speed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the generation of high-power pulses with sharp voltage transitions and reduced power losses, effectively addressing the limitations of existing technologies by providing a reliable and efficient power supply for plasma processes.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Data Source
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AI summary
High-power- (HP-) generator (10) configured to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20) - wherein the control unit (22) further comprises switching units (24, 26, 28), ∘ having current rise capability of at least 10 A/µs, and/or ∘ having capability of withstanding voltage of about 0,5 kV or more with voltage rise and fall rates of 15 kV/µs or more.