Monolithic Gas Delivery Nozzle for Uniform Thermal Etching
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Solution Overview
Problem
Current gas delivery nozzles in plasma processing systems face thermal non-uniformity issues due to material mismatches in O-rings, alignment problems, and the need for multiple components, which affect performance and efficiency in etching processes.
Innovation Solution
The use of additive manufacturing to create a unitary gas delivery nozzle with integrated electrode plates, joining structures, and gas divider walls of the same material, eliminating the need for separate O-rings and improving thermal conductivity and alignment, while also integrating with a cooling plate and RF block as a single component.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If multiple separate components (upper electrode plate, lower electrode plate, pins, O-rings) are assembled to form the gas delivery nozzle, then the nozzle can provide gas distribution and sealing functions, but thermal non-uniformity occurs due to material mismatches between different components
Solution Approach 1:
The patent combines multiple separate components (upper electrode plate, lower electrode plate, pins, and O-rings) into a single monolithic gas delivery nozzle formed by additive manufacturing. This integration eliminates the material interfaces between dissimilar materials, ensuring uniform thermal conduction throughout the structure while maintaining all necessary functions including gas distribution through integrated channels and sealing through integrated features.
Solution Approach 2:
The patent uses a single material for the entire gas delivery nozzle structure, eliminating the need for material mismatches between dissimilar components. The monolithic structure ensures consistent thermal and electrical properties throughout, while additive manufacturing enables complex internal geometries and integrated features that would be difficult to achieve with traditional composite assemblies.
2Adaptability or versatility
If multiple separate components are press-fitted together to form the gas delivery nozzle, then the nozzle can be assembled with distinct functional regions, but alignment problems and manufacturing complexity increase
Solution Approach 1:
The patent integrates all functional regions (gas distribution zones, sealing areas, structural support) into a single monolithic component formed by additive manufacturing. This eliminates the need for assembly and alignment of multiple separate parts, while the additive manufacturing process enables complex internal geometries and integrated features that provide distinct functional regions within the unified structure.
3Reliability
If O-rings of different material are used to seal between electrode plates, then sealing function is provided, but thermal conductivity uniformity deteriorates
Solution Approach 1:
The patent integrates sealing features directly into the monolithic nozzle structure formed by additive manufacturing, eliminating the need for separate O-rings. The sealing functionality is incorporated as integral features of the single-material structure, ensuring continuous thermal conduction paths without interruption from dissimilar material interfaces.
Solution Approach 2:
The patent uses a single homogeneous material for the entire gas delivery nozzle structure, including all sealing features. This eliminates the thermal conductivity discontinuities that occur at interfaces between dissimilar materials like O-rings and metal electrode plates, ensuring uniform heat distribution throughout the structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances thermal conductivity, reduces manufacturing costs and complexity, eliminates alignment issues, and improves the precision and consistency of etching processes by providing a more uniform thermal profile and simplified assembly.
Implementation Method 1
Each of the multiple joining structures is configured to transfer RF energy and thermal energy between the upper electrode portion and the lower electrode portion
Implementation Method 2
The upper electrode portion, the lower electrode portion, the plurality of joining structures, and the one or more gas zone divider walls are of a same material
Data Source
AI summary
Example structures, methods, and systems for additive manufacturing of components of source and gas delivery nozzle assembly are disclosed. One example structure includes a unitary gas distribution nozzle assembly that includes an upper electrode portion and a lower electrode portion joined by multiple joining structures, and one or more gas zone divider walls positioned between the upper electrode portion and the lower electrode portion. The unitary gas distribution nozzle assembly is of a single material. Each of the multiple joining structures is positioned between the upper electrode portion and the lower electrode portion. Each of the multiple joining structures is configured to transfer radio-frequency (RF) energy and thermal energy between the upper electrode portion and the lower electrode portion. The one or more gas zone divider walls are configured to separate a region between the upper electrode portion and the lower electrode portion into two or more plenum chambers.