Monolithic Power Transfer System for Sputter Endblocks
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Solution Overview
Problem
Existing power transfer systems in sputter devices require time-consuming adjustments and frequent replacement of carbon brushes, which degrade in wet environments, making them inefficient and difficult to install, especially when coolant is present.
Innovation Solution
A monolithic power transfer system with resilient, electrically conductive parts that clamp onto the endblock, eliminating the need for separate wiring and allowing easy installation, replacement, and operation in wet conditions, using materials like copper-beryllium alloys for effective electrical conductivity and elastic deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If carbon brushes are used to transfer power from static to rotating parts, then electrical power can be transferred, but the system requires time-consuming adjustments and frequent replacement due to wear and corrosion in wet environments
Solution Approach 1:
The patent extracts the power transfer function from the rotating carbon brushes and relocates it to the stationary endblock. The power transfer system is separated into a stationary conductive component in the endblock and a rotating component on the sputter target, eliminating the need for sliding contacts that require adjustment and replacement.
Solution Approach 2:
The patent introduces a monolithic power transfer system as an intermediary between the static endblock and the rotating sputter target. This system uses resilient electrically conductive parts that clamp onto the endblock, providing reliable power transfer without the mechanical and chemical degradation issues of carbon brushes in wet environments.
2Power
If carbon brushes are used in wet environments with coolant present, then power transfer is possible, but the brushes degrade due to corrosion and the lubricating layer dissipates rapidly
Solution Approach 1:
The patent replaces the expensive and short-lived carbon brushes with a durable monolithic power transfer system made of corrosion-resistant materials. The new system is designed to last the entire service life of the sputter device, eliminating frequent replacements and associated downtime.
Solution Approach 2:
The patent uses resilient electrically conductive materials, such as copper-beryllium alloys, that combine electrical conductivity, mechanical resilience, and corrosion resistance. These composite properties allow the power transfer system to function reliably in wet environments with coolant present without degrading.
3Adaptability or versatility
If multiple separate components are used for power transfer, then functionality can be achieved, but installation becomes complex and time-consuming
Solution Approach 1:
The patent merges multiple separate power transfer components into a single monolithic structure that integrates the conductive elements, resilient parts, and clamping mechanisms. This unified design simplifies installation to a single operation while maintaining all necessary functional capabilities for reliable power transfer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides a simple, efficient, and durable power transfer solution that reduces installation time, eliminates the need for multiple adjustments, and maintains optimal cooling, with parts that can be easily replaced and are resistant to corrosion in wet environments.
Implementation Method 1
the first and/or the second and/or the third part is resilient such that, when mounted, the power transfer system is clamped between the first part of the endblock and the second part of the endblock
Implementation Method 2
the power transfer system comprises: a first part (110) comprising a contact surface (115) positionable against a first part (210) of an endblock (200) of the sputter device
Data Source
AI summary
A power transfer system is described for transfer of electrical power to a sputter target in a sputter device. It comprises a first part comprising a contact surface positionable against a first part of an endblock of the sputter device, a second part inseparably connected to the first part and a third part, and a third part comprising a contact surface positionable against a second part of the endblock or directly against a sputter target when mounted on the endblock. At least two of the three parts are formed as one monolithic piece. One of the parts of the power transfer system is resilient such that, when mounted, the power transfer system is clamped between the first part of the endblock and the second part of the endblock or the sputter target. This part is also responsible for the transfer of electrical power.