Monolithic RC Snubber Using Junction Termination Edge for SiC MOSFETs

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Solution Overview

Problem

High power and high voltage transistors, such as SiC MOSFETs, experience undesirable commutation oscillations due to rapid switching, leading to electromagnetic interference and inefficiencies, which existing external RC snubbers attempt to mitigate but introduce leakage inductance and increased switching losses.

Innovation Solution

An RC snubber is integrated monolithically with the unipolar power transistor on the same semiconductor substrate, eliminating parasitic inductance and reducing area consumption, using a poly silicon resistor and capacitor formed from junction termination edge materials to effectively dampen oscillations without external components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If external RC snubbers are used to dampen oscillations, then oscillation damping is improved, but leakage inductance and switching losses increase

Engineering Contradiction:
Improveoscillation dampingVSAvoidswitching losses
Core Design Contradiction:
Stability of the object's compositionVSLoss of energy

Solution Approach 1:

The RC snubber circuit is merged with the power transistor by forming both structures monolithically on the same semiconductor substrate. The capacitor is formed as part of the junction termination edge, and the resistor is integrated within the transistor structure, eliminating the need for external snubber components and reducing parasitic inductance while maintaining oscillation damping capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The junction termination edge serves as an intermediary structure that dual-purpose: it provides electrical field termination for high voltage operation and simultaneously forms the capacitor of the RC snubber circuit. This eliminates the need for separate external capacitor components and reduces parasitic inductance

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If external RC snubbers are used to dampen oscillations, then oscillation damping is improved, but device area consumption increases

Engineering Contradiction:
Improveoscillation dampingVSAvoiddevice area
Core Design Contradiction:
Stability of the object's compositionVSArea of stationary object

Solution Approach 1:

The RC snubber circuit is merged with the power transistor by forming both structures monolithically on the same semiconductor substrate. The capacitor is formed as part of the junction termination edge, and the resistor is integrated within the transistor structure, eliminating the need for external snubber components and reducing parasitic inductance while maintaining oscillation damping capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The junction termination edge is given multiple functions: it provides electrical field termination for high voltage operation and simultaneously serves as the capacitor structure for the RC snubber. This multi-functionality eliminates the need for separate external components and reduces overall device area

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Stability of the object's composition

If external RC snubbers are used to dampen oscillations, then oscillation damping is improved, but parasitic inductance increases

Engineering Contradiction:
Improveoscillation dampingVSAvoidparasitic inductance
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The RC snubber circuit is merged with the power transistor by forming both structures monolithically on the same semiconductor substrate. The capacitor is formed as part of the junction termination edge, and the resistor is integrated within the transistor structure, eliminating the need for external snubber components and reducing parasitic inductance while maintaining oscillation damping capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The junction termination edge serves as an intermediary structure that dual-purpose: it provides electrical field termination for high voltage operation and simultaneously forms the capacitor of the RC snubber circuit. This eliminates the need for separate external capacitor components and reduces parasitic inductance

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This integration reduces leakage inductance, minimizes area usage, and scales well with the number of transistors, providing efficient damping of oscillations while maintaining high voltage handling capabilities and reducing switching losses.

Implementation Method 1

The capacitor is between a poly silicon structure and the semiconductor substrate, and is part of the junction termination edge. The capacitor comprises a p-n junction.

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

If a load current in one of these transistors is switched off quickly, commutation oscillations may be triggered. The commutation oscillations can result in electromagnetic interference

Methodology Applied
Scientific EffectParasitic Capacitance: Parasitic Capacitance

Implementation Method 3

The RC snubber comprises a poly silicon resistor. The poly silicon resistor is between a source of the unipolar power transistor and a first layer forming the capacitor.

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 4

Operation of these transistors may result in relatively high commutation inductances, such as in the range of 20nH - 100nH per commutation path. If a load current in one of these transistors is switched off quickly, commutation oscillations may be triggered.

Methodology Applied
Scientific EffectJoule Heating: Joule Heating

Implementation Method 5

External RC snubbers attempt to mitigate but introduce leakage inductance and increased switching losses. This integration reduces leakage inductance

Methodology Applied
Scientific EffectParasitic Inductance:

Data Source

PatentEP4243062A1RC snubber with poly silicon resistor and capacitor formed from junction termination edge
Publication Date: 2023.09.13 INFINEON TECHNOLOGIES AG
  • EP4243062A1 patent drawingFigure 1
  • EP4243062A1 patent drawingFigure 2
  • EP4243062A1 patent drawingFigure 3

AI summary

An apparatus includes a junction termination edge (260), a unipolar power transistor, and an RC snubber (201). The RC snubber has a capacitor (220) between a poly silicon structure (221) and a semiconductor substrate (212), and part of the junction termination edge. The capacitor has a p-n junction. The RC snubber has a poly silicon resistor (218) between a source (244) of the unipolar power transistor and a first layer (210) forming the capacitor. The unipolar transistor and the RC snubber are coupled in parallel. The RC snubber and the unipolar power transistor are formed monolithically on the semiconductor substrate.