Monolithic Silicon Bridge Stack for 3D Device Integration

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Solution Overview

Problem

The miniaturization of semiconductive devices poses challenges in assembly due to shrinking device and package sizes, requiring innovative solutions for efficient integration and communication between stacked dice without increasing footprint or contact lengths.

Innovation Solution

A monolithic silicon bridge stack is implemented, utilizing a baseband processor die as a substrate and hybrid silicon bridge, with through-silicon vias (TSVs) and redistribution layers (RDLs) to facilitate communication and power/ground contacts between stacked devices, reducing contact distances and eliminating the need for a dedicated memory controller hub.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If semiconductive devices are miniaturized to reduce package size, then device footprint is reduced, but assembly complexity and difficulty increase

Engineering Contradiction:
Improvepackage footprintVSAvoidassembly difficulty
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The patent transitions from planar device arrangement to three-dimensional stacking configuration. Multiple semiconductive devices are arranged vertically in stacked layers rather than side-by-side in a single plane, enabling significant footprint reduction while maintaining assembly feasibility through standardized vertical interconnection processes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested stacking architecture where smaller devices are positioned within the footprint boundary of larger devices in adjacent layers. This nested arrangement allows multiple devices to occupy overlapping horizontal spaces at different vertical levels, maximizing space utilization and reducing overall package footprint

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of stationary object

If devices are stacked closer together to reduce footprint, then package area is reduced, but contact lengths between devices increase

Engineering Contradiction:
Improvepackage areaVSAvoidcontact length
Core Design Contradiction:
Area of stationary objectVSLength of stationary object

Solution Approach 1:

The patent introduces an intermediary substrate layer positioned between stacked devices to provide centralized interconnection points. This intermediary layer acts as a mediator that redistributes electrical contacts, allowing shorter individual contact lengths between adjacent devices while maintaining overall connectivity through the substrate's redistribution network

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the interconnection function into multiple stages: direct contacts from upper devices to the intermediary substrate, and separate contacts from lower devices to the same substrate. This segmentation breaks down long direct contact paths into shorter sequential segments, reducing overall contact length and associated resistance

Inventive Principle:
Principle #1Segmentation

3Quantity of substance

If multiple devices are integrated into a compact stack, then device density increases, but bandwidth and communication performance deteriorate

Engineering Contradiction:
Improvedevice densityVSAvoidbandwidth
Core Design Contradiction:
Quantity of substanceVSProductivity

Solution Approach 1:

The patent implements local quality optimization by providing dedicated, short-contact interconnection paths for high-bandwidth communication between specific device pairs in the stack. Rather than using shared or long-distance connections, each critical communication path has its own optimized contact route through the intermediary substrate, maintaining high bandwidth despite increased device density

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11018114B2Monolithic silicon bridge stack including a hybrid baseband die supporting processors and memory
Publication Date: 2021.05.25 INTEL CORP
  • US11018114B2 patent drawing
  • US11018114B2 patent drawing
  • US11018114B2 patent drawing

AI summary

A semiconductive device stack, includes a baseband processor die with an active surface and a backside surface, and a recess in the backside surface. A recess-seated device is disposed in the recess, and a through-silicon via in the baseband processor die couples the baseband processor die at the active surface to the recess-seated die at the recess. A processor die is disposed on the baseband processor die backside surface, and a memory die is disposed on the processor die. The several dice are coupled by through-silicon via groups.