Motorized Stage Cooling for Wafer Inspection Precision
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Solution Overview
Problem
Inaccurate navigation errors occur in highly precise manufacturing processes due to heating issues in motorized systems used in inspection and review tools for wafer manufacturing, which affect the quality of the wafers.
Innovation Solution
A system comprising a chamber, motorized stages, temperature sensors, a cooling module, and a controller that actively controls temperature fluctuations by sensing multiple temperatures and adjusting the cooling module to prevent navigation errors, using both liquid and gas-based cooling methods, including Peltier elements, to maintain stable temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If motorized system moves the chuck in the chamber, then inspection and review processes can be performed, but heating occurs causing navigation errors
Solution Approach 1:
The cooling module is activated before motorized movements to preemptively counteract the heating that will occur during operation. The controller predicts temperature changes based on upcoming movements and applies cooling in advance, preventing navigation errors before they occur.
Solution Approach 2:
Temperature sensors continuously monitor the chamber environment and feed temperature data back to the controller. The controller uses this feedback to dynamically adjust the cooling module's operation, ensuring temperature compensation is precisely matched to actual thermal conditions caused by motorized movements.
2Manufacturing precision
If cooling module is added to control temperature, then navigation errors are reduced, but device complexity increases
Solution Approach 1:
The cooling module is integrated into the existing chamber structure, sharing space and control infrastructure with other system components. The controller that manages motorized movements also manages temperature control, consolidating control functions rather than adding separate control systems.
Solution Approach 2:
The controller serves dual functions: managing motorized stage movements for inspection/review operations and simultaneously controlling the cooling module for temperature stabilization. This multi-functionality reduces the need for dedicated control hardware.
3Measurement precision
If multiple temperature sensors are used to monitor chamber temperature, then temperature control precision is improved, but device complexity increases
Solution Approach 1:
Temperature sensors are strategically positioned at specific locations within the chamber where temperature variations most impact navigation accuracy. Rather than uniformly distributing sensors throughout the chamber, they are placed at critical measurement points where local temperature monitoring provides maximum benefit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces navigation errors by maintaining stable temperatures within the chamber, enhancing the precision and accuracy of the manufacturing process by anticipating and mitigating temperature changes caused by motorized movements.
Implementation Method 1
a cooling module configured to cool a unit of the motorized system
Implementation Method 2
liquid and gas-based cooling methods
Implementation Method 3
including Peltier elements
Implementation Method 4
multiple temperature sensors configured to sense multiple temperatures of at least one point within the chamber
Implementation Method 5
The movements of the motorized system cause the motorized system to heat
Data Source
AI summary
A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.