Mounting Substrate With Segmented Grounds For Multi-Beam Electron Beam Placement
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Solution Overview
Problem
In multi-beam electron beam writing apparatuses, the position of the electron beam varies due to the magnetic field generated by the current flowing through the control circuit, affecting the precision of the beam placement.
Innovation Solution
A mounting substrate with electrically separated ground potential for each control circuit is used, where the ground layers are divided and connected through vias, and a high resistance film is applied to prevent electrical charge, ensuring that currents flow in parallel directions to minimize magnetic field interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a control circuit with current paths arranged in a complicated manner is incorporated in the mounting substrate, then blanking control can be performed on each beam, but the position of the electron beam varies due to the magnetic field generated by the current
Solution Approach 1:
The mounting substrate is divided into multiple regions, each with its own ground potential. Control circuits are segregated into different regions, and ground potentials are separated to prevent magnetic field interference between adjacent control circuits while maintaining independent blanking control capability for each beam region
Solution Approach 2:
Different ground potentials are assigned to different regions of the mounting substrate based on the local requirements of each control circuit. This allows each control circuit to operate with its own optimized ground reference, minimizing magnetic field effects on electron beams in that specific region
2Extent of automation
If multiple control circuits are integrated on the mounting substrate to control each beam independently, then beam blanking control is achieved, but magnetic field interference causes beam position variation
Solution Approach 1:
The mounting substrate is segmented into multiple independent control regions, each with dedicated control circuits and separate ground potentials. This segmentation allows independent beam control while isolating magnetic field effects to each region, preventing interference between control circuits
Solution Approach 2:
Ground potential separation acts as an intermediary mechanism between control circuits. By providing electrically isolated ground paths for each control circuit region, the patent prevents current loops that would generate magnetic fields, thereby maintaining beam position stability while preserving independent control capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively cancels out the magnetic field generated by each control circuit, reducing beam position variations and improving the stability and precision of the electron beam placement.
Implementation Method 1
The grounds corresponding to the plurality of control circuits are electrically separated from one another... effectively cancels out the magnetic field generated by each control circuit
Implementation Method 2
a high resistance film is applied to prevent electrical charge
Data Source
AI summary
According to one embodiment of the present invention, a mounting substrate is installed on a multi charged particle beam irradiation apparatus, and a blanking aperture array chip provided with blanking electrodes to perform blanking deflection on beams in a multi charged particle beam is mounted on the mounting substrate. The mounting substrate includes an opening through which the multi charged particle beam passes, a plurality of control circuits that supply a control signal to the blanking electrodes for each of a plurality of areas into which the blanking aperture array chip is divided, and grounds, each of which is provided for a corresponding one of the plurality of control circuits and configured to supply a ground electrical potential to the corresponding control circuit. The grounds corresponding to the control circuits are electrically separated from each other.