Mounting Table Heat Transfer Body for Substrate Temperature Control

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Solution Overview

Problem

Existing mounting tables with temperature control functions, such as electrostatic chucks, suffer from temperature singularities on the mounting surface, making precise temperature measurement of the workpiece challenging due to low heat conductivity of ceramic plates, leading to significant temperature gradients.

Innovation Solution

A mounting table design incorporating a ceramic body with a heater and a high heat conductivity heat transfer body that efficiently transfers heat from the measurement target point to a location above the ceramic body, allowing for precise temperature measurement without forming a through-hole under the workpiece, thereby reducing temperature gradients and thermal stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a temperature sensor is inserted into a through-hole in the ceramic body to measure workpiece temperature, then temperature measurement is enabled, but temperature singularities occur on the mounting surface and temperature gradients increase due to low heat conductivity of ceramic

Engineering Contradiction:

Improveworkpiece temperature measurementVSAvoidtemperature gradient and thermal stress

Core Design Contradiction:

Measurement precisionVSTemperature

Solution Approach 1:

A heat transfer body made of high heat conductivity material is introduced as an intermediary between the temperature sensor and the workpiece. This mediator efficiently conducts heat from the workpiece to the sensor without requiring a through-hole in the ceramic, thus enabling temperature measurement while avoiding temperature singularities and gradients caused by ceramic's low heat conductivity

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The heat conductivity parameter is changed by using a heat transfer body with high heat conductivity material instead of relying on the ceramic body's low heat conductivity. This parameter change enables effective heat transfer for temperature measurement while maintaining the integrity of the ceramic mounting surface

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If a through-hole is formed in the ceramic body for temperature sensor insertion, then temperature measurement is possible, but the structural integrity of the ceramic body is compromised and temperature distribution is disrupted

Engineering Contradiction:

Improveworkpiece temperature measurementVSAvoidceramic body integrity and temperature distribution

Core Design Contradiction:

Measurement precisionVSStability of the object's composition

Solution Approach 1:

The heat transfer body acts as an intermediary that eliminates the need for a through-hole in the ceramic body. It provides a separate heat conduction path from the workpiece to the temperature sensor, preserving the ceramic body's structural integrity and uniform temperature distribution while enabling accurate temperature measurement

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The temperature measurement function is moved from a vertical through-hole configuration to a lateral heat transfer configuration. The heat transfer body extends horizontally from the ceramic body to contact the workpiece, changing the dimensional approach to temperature sensing and avoiding disruption of the ceramic's vertical structural integrity

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables more accurate temperature measurement of the workpiece by minimizing temperature gradients and reducing thermal stress, enhancing the precision and reliability of temperature control in substrate processing applications.

Implementation Method 1

a heat transfer body extending between a first end provided in the ceramic body and a second end that is positioned above the space and provided closer to the space side than the first end, the heat transfer body having a heat conductivity that is higher than that of the ceramic body around the heat transfer body

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

a heater provided in the ceramic body

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS10512125B2Mounting table and substrate processing apparatus

Publication Date: 2019.12.17 TOKYO ELECTRON LTD

AI summary

Provided is a mounting table according to one aspect of the present disclosure includes: a ceramic body; a heater provided in the ceramic body; a base including a support surface that supports the ceramic body and provides a space for accommodating a temperature sensor as a space that is opened at least at the support surface side; and a heat transfer body extending between a first end provided in the ceramic body and a second end that is positioned above the space and provided closer to the space than the first end, the heat transfer body having a heat conductivity that is higher than that of the ceramic body around the heat transfer body.