Movable Carrier Element for Vacuum Sample Handling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing particle beam devices require complex structures and time-consuming processes for sample preparation and examination, with risks of contamination and inefficient sample handling, particularly when extracting and re-examining samples outside the vacuum chamber.
Innovation Solution
A particle beam device with a movable carrier element and receiving elements allows for sample preparation and examination within the vacuum chamber, enabling simple and automated movement sequences without the need for additional movement mechanisms, allowing for the extraction and reconnection of receiving elements to position samples for irradiation by particle beams.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a sample is extracted from a first sample and attached to a sample holder on a manipulator, then the second sample can be examined in a second position, but the device structure becomes very complex
Solution Approach 1:
The patent combines the sample holder and manipulator functions into a single integrated carrier element that can hold multiple samples and move between positions. This merging eliminates the need for separate sample extraction mechanisms and reduces overall device complexity while maintaining the capability to examine multiple samples.
Solution Approach 2:
The carrier element is designed to serve multiple functions: it can hold multiple samples simultaneously, move between different examination positions, and work with both ion beam and electron beam columns. This multi-functionality replaces the need for specialized mechanisms for each function, simplifying the overall device structure.
2Measurement precision
If a sample holder is removed from the vacuum chamber for further examination, then the second sample can be analyzed, but the process becomes time-consuming and contamination risk increases
Solution Approach 1:
The patent maintains the vacuum chamber environment throughout the entire sample examination process. By keeping all examination activities within the vacuum chamber, the sample remains in a controlled, contamination-free environment, eliminating contamination risks associated with removing samples to external examination equipment.
Solution Approach 2:
The carrier element is pre-configured with multiple sample holders in positions that allow sequential examination without removing the carrier from the vacuum chamber. The samples are prepared and positioned in advance on the carrier, enabling immediate examination when the carrier moves to the appropriate position, thus eliminating time-consuming removal and reinstallation processes.
3Ease of operation
If receiving elements have movement mechanisms for positioning samples, then sample irradiation can be achieved, but the device complexity increases
Solution Approach 1:
The carrier element itself provides the positioning function through its ability to move between different positions and orientations within the vacuum chamber. The receiving elements on the carrier do not need independent movement mechanisms because the carrier's motion serves to position the samples correctly relative to both the ion beam and electron beam columns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the sample preparation and examination process, reduces contamination risks, and enables efficient, fully automated handling of samples within the vacuum chamber, improving the overall efficiency and reliability of particle beam device operations.
Implementation Method 1
a piece is cut out of the sample by means of an ion beam and this piece cut out is attached to a sample holder
Implementation Method 2
an electron beam is now focused on this piece for further examination. Electrons passing through this piece are detected by a detector
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a particle beam device (1) and a method for use with a particle beam device (1) in which a sample is arranged on a support element (5). The invention is based on the objective of providing a particle beam device and a method applicable in this particle beam device for sample preparation and/or sample analysis, wherein the device is of simple construction and the method is not very time-consuming. This objective is achieved by a particle beam device (1) that has a movable support element (5) with two receiving elements (6, 7) for each receiving a sample, or in which the receiving element is detachably arranged on the support element. The method according to the invention provides for the use of this support element (5).