Movable-Frame Actuator Structure for Resonance and Deformation Control

The second movable part employs non-uniform width design where specific connection portions have different widths in different regions. The first connection portions have a first width while the second connection portions have a second width that is different from the first width, creating local variations in moment of inertia to independently control vibration and deformation characteristics

The patent modifies the geometric parameters of the second movable part by varying the width of different connection portions. By changing the width parameters (first width vs second width) and the positions of connection portions, the moment of inertia distribution is adjusted to achieve both high resonant frequency and low deformation simultaneously

Instead of uniformly increasing the size of the second movable part, the patent applies local quality by making only specific connection portions wider. The first connection portions maintain a smaller first width while the second connection portions have a larger second width, locally increasing moment of inertia where needed without globally increasing the part size

The patent resolves the dimensional conflict by introducing width variations in the planar dimension of the second movable part. By varying width in different regions rather than increasing overall size in all dimensions, the moment of inertia is selectively adjusted for different rotational axes