Movable Imaging for Substrate Transfer Alignment Detection
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Solution Overview
Problem
In semiconductor manufacturing, substrate transfer devices face challenges in accurately detecting the position and posture of substrates due to obstructions blocking the imaging member's view during photolithography processes, leading to potential substrate damage or misalignment.
Innovation Solution
A substrate treating apparatus with a detection unit mounted on a robot, featuring a movable imaging member controlled by a controller to determine and maintain an optimal imaging position based on process variables, allowing for precise imaging and alignment assessment, and including an alarm system for abnormal substrate states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the imaging member is fixed to the substrate transfer device, then the device complexity is reduced, but the imaging member cannot capture substrate images when blocked by apparatus components
Solution Approach 1:
The imaging member is made movable relative to the substrate transfer device through a driving mechanism. The controller dynamically adjusts the imaging member's position based on real-time substrate transfer status and imaging requirements, enabling the imaging member to move to optimal imaging positions and avoid obstructions, thus resolving the contradiction between detection reliability and device complexity
Solution Approach 2:
The system implements feedback control where the controller receives information about substrate transfer status and imaging conditions, then adjusts the imaging member's position accordingly. This closed-loop control ensures the imaging member maintains optimal positioning for reliable substrate state detection while adapting to changing operational conditions
2Measurement precision
If the imaging member is moved to optimal position dynamically, then the imaging capability is improved, but the operation time and system complexity increase
Solution Approach 1:
The imaging member's position is adjusted in advance before substrate imaging is required. The controller predicts the optimal imaging position based on the substrate transfer trajectory and pre-positions the imaging member, eliminating delays during actual imaging operations and maintaining high measurement precision without time loss
Solution Approach 2:
The imaging member moves continuously or in smooth steps to maintain optimal imaging positions throughout the substrate transfer process. This continuous adjustment ensures uninterrupted imaging capability and precise alignment detection without pausing the substrate transfer workflow, thus avoiding time loss while maintaining measurement precision
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of treating chambers performing a respective treatment on a substrate therein; a transfer chamber having a robot transferring the substrate between the plurality of treating chambers; a detection unit mounted on the robot and configured to detect a substrate state; and a controller for controlling the detection unit, wherein the detection unit comprises: an imaging member for imaging the substrate; and a driving member for moving the imaging member, and wherein the controller controls the detection unit to image and store an image of the substrate at an optimal position and determines whether an image of the substrate is a normal state based on the image obtained in the optimal position, the optimal position determined based on a process variable of the treating chamber.