MRAM Free-Layer Stack With High-Exchange Spacer for Fast Retention

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Solution Overview

Problem

Current memory technologies face challenges in achieving a balance between high-speed operation, non-volatility, and low power consumption, with existing memory solutions like DRAM requiring frequent refreshing and having limited data retention times.

Innovation Solution

The development of magnetoresistive random-access memory (MRAM) devices with spin Hall electrodes and magnetic tunnel junctions (MTJs) that utilize spin transfer torque or spin-orbit torque mechanisms, allowing for efficient data storage and retrieval with long retention times and low power consumption, by patterning the spin Hall electrode to create varying thickness regions for enhanced current flow and resistance differences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If DRAM is used for high-speed operation, then speed is improved, but data retention time deteriorates due to frequent refreshing requirements

Engineering Contradiction:
Improveoperation speedVSAvoiddata retention time
Core Design Contradiction:
SpeedVSDuration of action of stationary object

Solution Approach 1:

The patent changes the fundamental operating parameter from volatile electrical charge storage (DRAM) to non-volatile magnetic state storage (MRAM). By utilizing magnetic tunnel junctions with different resistance states corresponding to magnetic orientations, the system achieves both high-speed operation through electrical read/write access and long data retention times without refreshing, as the magnetic states are inherently non-volatile.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by stationary object

If MRAM with spin Hall electrode is used, then power consumption is reduced and data retention is improved, but device complexity increases due to additional magnetic layers and spin Hall electrode structure

Engineering Contradiction:
Improvepower consumptionVSAvoidstructure complexity
Core Design Contradiction:
Use of energy by stationary objectVSDevice complexity

Solution Approach 1:

The patent merges the write current path through the spin Hall electrode with the magnetic tunnel junction structure. The spin Hall electrode serves dual purposes: it generates spin-orbit torque for magnetic switching and provides the read current path. This integration reduces the need for separate write and read structures, thereby managing complexity while achieving low power consumption through efficient spin transfer torque mechanisms.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces traditional magnetic field-based write mechanisms (which require external coils and high currents) with spin-orbit torque generated by spin Hall effect in the electrode. This substitution eliminates the need for external magnetic field generation structures, reducing device complexity while achieving efficient magnetic switching with lower power consumption.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If spin Hall electrode with varying thickness is patterned, then current flow efficiency is improved and resistance differences are enhanced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecurrent flow efficiencyVSAvoidthickness control precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent implements local quality variation in the spin Hall electrode by creating regions of different thicknesses. The central region has greater thickness to provide higher spin Hall angle and stronger spin-orbit torque for reliable magnetic switching, while peripheral regions have reduced thickness to lower resistance for efficient current flow. This spatially varying thickness profile optimizes both switching efficiency and current flow characteristics.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent addresses manufacturing precision challenges by transitioning from controlling thickness in one dimension to utilizing the vertical dimension for functional differentiation. The varying thickness is achieved through selective etching or deposition processes that create a depth profile, transforming a single-parameter control problem into a multi-dimensional structural solution that enhances both current efficiency and switching performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

MRAM devices offer fast read and write speeds, long data retention times, and reduced power consumption, making them suitable for next-generation memory technologies that combine the benefits of SRAM and DRAM while overcoming their limitations.

Implementation Method 1

MRAM devices with spin Hall electrodes and magnetic tunnel junctions (MTJs) that utilize spin transfer torque or spin-orbit torque mechanisms

Methodology Applied
Scientific EffectSpin Hall Effect: Hall Effect

Implementation Method 2

utilize spin transfer torque or spin-orbit torque mechanisms

Methodology Applied
Scientific EffectSpin-orbit torque:

Implementation Method 3

utilize spin transfer torque or spin-orbit torque mechanisms

Methodology Applied
Scientific EffectSpin transfer torque:

Implementation Method 4

patterning the spin Hall electrode to create varying thickness regions for enhanced current flow and resistance differences

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Data Source

PatentUS20240016066A1Memory device and method of fabricating the same
Publication Date: 2024.01.11 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240016066A1 patent drawing
  • US20240016066A1 patent drawing
  • US20240016066A1 patent drawing

AI summary

A memory device includes a substrate, a reference layer, a tunneling layer, a film stack, and a capping layer. The reference layer is disposed on the substrate. The tunneling layer is disposed on the reference layer. The film stack is formed over the tunneling layer and on the substrate, wherein the film stack includes a first free layer, a spacer with high exchange stiffness constant and a second free layer. The first free layer is in contact with the tunneling layer and the film stack. The spacer with high exchange stiffness constant is sandwiched between the first free layer and the second free layer. The capping layer is disposed on and electrically connected to the film stack.