Magnetoresistive Memory Device Hexagonal MTJ Stacking

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Solution Overview

Problem

Current magnetoresistive memory devices using magnetic tunnel junction (MTJ) elements face challenges in achieving high density and reducing cell size due to limitations in arranging MTJ elements in a way that maximizes space efficiency and density without increasing the pitch between elements.

Innovation Solution

The implementation of a magnetoresistive memory device structure where MTJ elements are arranged in a hexagonal close-packed or square grid structure across multiple layers, allowing for increased density by optimizing the pitch between elements while maintaining wide spaces within each layer, achieved through specific wiring and contact arrangements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If MTJ elements are arranged in conventional square grid structure, then manufacturing is simpler, but density is lower and cell size is larger

Engineering Contradiction:
ImproveMTJ element densityVSAvoidwiring and contact arrangement complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from a conventional two-dimensional square grid arrangement to a three-dimensional stacked architecture where MTJ elements are arranged in multiple layers. This vertical stacking enables higher density by utilizing the third dimension (height) rather than only expanding in the planar dimensions, thereby increasing the number of MTJ elements per unit area without proportionally increasing wiring complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the MTJ element array into multiple independent layers, with each layer containing a subset of MTJ elements. This segmentation allows for modular manufacturing and independent optimization of each layer, reducing the overall complexity of wiring and contact arrangements while achieving higher total density through the combination of multiple layers.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If pitch between MTJ elements is reduced to increase density, then more elements fit in unit area, but manufacturing precision requirements increase

Engineering Contradiction:
ImproveMTJ element densityVSAvoidpitch control precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

By stacking MTJ elements in multiple vertical layers, the patent effectively increases the usable area for element placement without reducing the pitch within individual layers. This approach allows maintaining larger, more manufacturable pitch dimensions while achieving higher overall density through the multiplication of elements across multiple layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If MTJ elements are arranged to maximize space efficiency, then density increases, but cell size reduction is limited

Engineering Contradiction:
ImproveMTJ element densityVSAvoidcell size
Core Design Contradiction:
Quantity of substanceVSVolume of moving object

Solution Approach 1:

The patent achieves cell size reduction by distributing MTJ elements across multiple vertical layers rather than packing them densely in a single plane. This three-dimensional arrangement allows each memory cell to occupy a smaller footprint area while the overall cell volume is efficiently utilized through vertical stacking, thereby reducing the effective cell size in the planar dimension.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables a higher density of MTJ elements per unit area with reduced cell size, as demonstrated by calculations showing increased MTJ element density and reduced pitch requirements, facilitating a high-density cell structure.

Implementation Method 1

In a spin injection MRAM using spin injection magnetization inversion technology, data is written to an MTJ element by energizing the MTJ element in a direction perpendicular to a film surface of the MTJ element.

Methodology Applied
Scientific EffectSpin injection magnetization inversion:

Data Source

PatentUS10026779B2Magnetoresistive memory device and manufacturing method of the same
Publication Date: 2018.07.17 KIOXIA CORP
  • US10026779B2 patent drawing
  • US10026779B2 patent drawing
  • US10026779B2 patent drawing

AI summary

According to one embodiment, a magnetoresistive memory device, includes first wirings arranged parallel to each other in or on a substrate, second wirings arranged parallel to each other above the substrate to cross the first wirings when viewed in a direction perpendicular to a surface of the substrate, and magnetoresistive elements provided corresponding to intersections of the first and second wirings, respectively, and divided into layers.