Multi-axis Robot Substrate Transfer with Dual SCARA
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Solution Overview
Problem
Existing electronic device manufacturing systems face limitations in achieving rapid and precise substrate transfer between process chambers and load locks, with existing multi-axis robots requiring additional moves and having limited misalignment adjustment capabilities, which hampers throughput and efficiency.
Innovation Solution
A multi-axis robot apparatus with dual SCARA robots operating along co-parallel lines of action, allowing simultaneous or sequential extension and retraction, enabling independent misalignment correction and fast substrate swaps between carousels and load locks, thereby enhancing transfer efficiency and system utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional transfer robot is used to transport substrates between chambers, then the system achieves sufficient throughput, but additional throughput gains are difficult to obtain due to limited transfer speed and precision
Solution Approach 1:
The transfer robot is divided into two independent SCARA robots (first and second SCARA robots) that can operate simultaneously. Each SCARA robot handles substrate transfer independently, allowing parallel operations between load lock and carousel, thereby doubling the potential throughput without increasing individual transfer time
Solution Approach 2:
The dual SCARA robot system enables continuous substrate transfer operations by having one robot serve the load lock while the other serves the carousel simultaneously. This eliminates idle time and ensures that both robots are constantly engaged in useful transfer actions, maximizing system productivity
2Manufacturing precision
If a conventional multi-axis robot is used for substrate transfer, then the system operates with adequate functionality, but misalignment adjustment capabilities are limited and require additional moves
Solution Approach 1:
The SCARA robots incorporate dynamic misalignment correction capabilities that allow real-time adjustment of substrate positioning during the transfer process. The robots can independently adjust their end effector positions to compensate for misalignment without requiring additional corrective moves, thereby improving precision while reducing time loss
3Ease of operation
If a single robot is used to service both load lock and carousel, then the system structure is simpler, but the robot requires additional moves and has limited serviceability
Solution Approach 1:
The single robot function is segmented into two dedicated SCARA robots, with each robot specialized for serving specific chambers (load lock or carousel). This segmentation improves serviceability and ease of operation while maintaining manageable system complexity through modular architecture
Solution Approach 2:
Each SCARA robot is designed with universal end effectors that can handle multiple substrate types and interface with different chamber types (load lock or carousel). This multi-functionality allows the robots to serve multiple purposes while keeping the overall system structure relatively simple
Data Source
AI summary
Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and/or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.