Multi-Beam Particle Microscope Adaptive Imaging
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Solution Overview
Problem
Current multi-beam particle microscopes are inefficient for imaging large or complex 3D samples, such as integrated circuits, due to high data acquisition times and the need for extensive stage movements, which limits the speed of 3D reconstruction.
Innovation Solution
The method involves determining the feature size of each layer in a 3D sample and adjusting the pixel size and beam pitch size accordingly to optimize imaging, allowing for faster data acquisition while maintaining resolution, and classifying regions within a layer based on feature sizes to further enhance imaging speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single-beam particle microscope is used for imaging, then the equipment cost is low, but the imaging time and data acquisition time are excessively long
Solution Approach 1:
The patent combines multiple particle beams into a single multi-beam particle microscope system that shares common particle optics. Multiple beams are generated from a single source and focused onto different locations of the sample simultaneously, enabling parallel imaging of multiple regions. This merging approach maintains cost-effectiveness while dramatically improving imaging throughput compared to using multiple separate single-beam microscopes.
Solution Approach 2:
The patent segments the imaging field into multiple regions that can be scanned simultaneously by different beams within the same optical system. The particle beam is divided into multiple sub-beams that are spatially separated and directed to different areas of the sample, allowing concurrent acquisition of data from multiple locations without requiring multiple complete microscope systems.
2Measurement precision
If the pixel size is reduced to maintain high resolution, then the imaging precision is improved, but the data acquisition time increases significantly
Solution Approach 1:
The patent dynamically adjusts the pixel size parameter based on the feature size of the layer being imaged. For layers with smaller features, a smaller pixel size is selected to maintain resolution. For layers with larger features, a larger pixel size is used to reduce the total number of pixels and accelerate data acquisition. This adaptive parameter adjustment optimizes the trade-off between resolution and imaging speed for different structural scales.
Solution Approach 2:
The patent applies different pixel sizes to different regions or layers based on their feature characteristics. Rather than using a uniformly small pixel size throughout, the system uses larger pixels where high resolution is not critical, thereby reducing overall data volume and acquisition time while maintaining sufficient resolution where needed.
3Area of stationary object
If a multi-beam particle microscope is used to scan large areas, then the field of view coverage is improved, but the complexity of the particle optics arrangement increases
Solution Approach 1:
The patent designs a multi-beam particle microscope where a single particle optics arrangement serves multiple functions: it focuses multiple beams simultaneously, enables scanning of large areas through coordinated beam deflection, and maintains the ability to achieve high resolution when needed. The shared optical system performs what would otherwise require multiple separate optical trains, reducing overall system complexity despite the increased functional requirements.
4Device complexity
If the beam pitch size is increased to reduce the number of beams, then the device complexity is reduced, but the imaging resolution deteriorates
Solution Approach 1:
The patent implements dynamic adjustment of beam pitch size based on the imaging requirements of different layers. The beam pitch can be modified during the imaging process to match the feature size of the current layer being examined. This dynamic adaptability allows the system to use larger beam pitches (fewer beams) when imaging larger features, reducing complexity, while switching to smaller beam pitches (more beams) when high resolution is required for smaller features.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for imaging and reconstruction of 3D samples by optimizing pixel and beam pitch sizes, achieving higher throughput even with low-speed stages and enabling faster analysis of complex structures like integrated circuits.
Implementation Method 1
Secondary particles, such as e.g. electrons, emitted from a location where the particle beam is incident, are detected
Data Source
AI summary
A fast method of imaging a 2D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 2D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.