Multi-Beam Particle Optical System for High Throughput Inspection
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Solution Overview
Problem
Conventional transmission electron microscopes are less suited for inspecting large image fields at high resolutions and high throughput.
Innovation Solution
A charged particle optical system that generates multiple beams of charged particles, deflects them across an object plane using a deflector arrangement, and detects the particles using a multi-pixel detector system, allowing for simultaneous imaging of multiple locations with improved throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single focused electron beam is scanned across the object, then high image resolution is achieved, but the imaging throughput is low and the time required to obtain image information is long
Solution Approach 1:
The patent divides a single electron beam into multiple parallel beams using a beam splitting system. Each beam is directed to a different location on the object, allowing simultaneous acquisition of image information from multiple points. This segmentation of the beam path enables parallel imaging, significantly increasing throughput while maintaining the resolution benefits of focused beams.
2Area of stationary object
If the image field size is increased to cover larger areas, then more image locations can be inspected, but the image resolution decreases
Solution Approach 1:
The patent uses multiple parallel beams to simultaneously cover different regions of a large image field. Each beam maintains its focus and resolution characteristics while contributing to a different portion of the overall image. This allows the system to inspect large areas without sacrificing the high resolution that would be lost in a conventional single-beam scanning approach.
3Productivity
If multiple particle beams are used to increase imaging speed, then the throughput is improved, but the beam paths may overlap causing interference
Solution Approach 1:
The patent employs a deflector arrangement that operates in multiple dimensions to spatially separate the parallel beams. By using electromagnetic fields to deflect beams along different trajectories in the x and/or y directions, the system ensures that each beam travels through its own distinct path region. This multi-dimensional separation prevents beam interference while maintaining the parallel architecture needed for high throughput imaging.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables faster imaging of large image fields with high resolution by directing multiple non-overlapping beams onto an object plane, reducing the time required to obtain image information compared to single-beam systems.
Implementation Method 1
a beam generating system configured to generate a plurality of charged particle beams and to direct the plurality of particle beams onto an object plane
Implementation Method 2
a first deflector arrangement arranged in the beam path of the particle beams upstream of the object plane and configured to deflect the plurality of particle beams before they are incident on the object plane
Implementation Method 3
at least one first particle optical lens configured to collect particles of the particle beams emanating from the object plane on the detectors
Implementation Method 4
a plurality of detectors configured to receive and to detect the plurality of particle beams having traversed the object plane
Data Source
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AI summary
A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).