Multi-Compartment Crucible for Stable OLED Evaporation

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Solution Overview

Problem

Existing evaporation methods and apparatuses face challenges in maintaining a predetermined evaporation rate over extended times, particularly for temperature-sensitive organic materials, leading to impurities and reduced OLED device performance due to chemical reactions and thermal exposure.

Innovation Solution

A crucible with separate material compartments and dedicated heaters, allowing for alternating evaporation and condensation processes to maintain a stable evaporation rate and reduce impurity formation, utilizing a vapor guiding compartment for purification and controlled temperature zones.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the source material is heated to high temperatures for extended periods to maintain evaporation rate, then the evaporation rate is maintained, but chemical reactions occur leading to impurity formation and reduced OLED device performance

Engineering Contradiction:
Improveevaporation rateVSAvoidimpurity formation
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The crucible is divided into multiple independent heating zones (first heating zone, second heating zone, third heating zone) that can be controlled separately. This segmentation allows different parts of the source material to be heated to different temperatures, enabling the evaporation zone to maintain high temperature for sustained evaporation rate while the condensation zone remains at lower temperature to prevent chemical reactions and impurity formation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the crucible are assigned different thermal characteristics - the evaporation region receives high heat input to maintain evaporation rate, while the condensation region receives reduced heat input to prevent thermal degradation. This local differentiation of thermal quality allows simultaneous optimization of evaporation efficiency and material purity.

Inventive Principle:
Principle #3Local quality

2Duration of action of moving object

If the source material is exposed to high temperatures over extended time, then evaporation continues, but the source material undergoes chemical reactions such as polymerization and oxidization

Engineering Contradiction:
Improveevaporation durationVSAvoidchemical stability
Core Design Contradiction:
Duration of action of moving objectVSStability of the object's composition

Solution Approach 1:

The crucible is divided into multiple independent heating zones (first heating zone, second heating zone, third heating zone) that can be controlled separately. This segmentation allows different parts of the source material to be heated to different temperatures, enabling the evaporation zone to maintain high temperature for sustained evaporation rate while the condensation zone remains at lower temperature to prevent chemical reactions and impurity formation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system implements periodic switching between evaporation and condensation modes in different heating zones. By alternating the active heating zones, the source material undergoes repeated cycles of evaporation and controlled condensation, which prevents prolonged thermal exposure in any single zone and thereby reduces chemical degradation while maintaining continuous evaporation duration.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution extends system run time by up to four times, reduces impurity formation, and maintains high-quality deposition of organic materials, thereby enhancing OLED device performance and longevity.

Implementation Method 1

heating the first material compartment to evaporate the source material generating evaporated source material

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

guiding the evaporated source material from the first material compartment to a vapor distributor

Methodology Applied
Scientific EffectVapor transport:

Implementation Method 3

heating the second material compartment to evaporate condensed source material in the second material compartment

Methodology Applied
Scientific EffectCondensation: Condensation

Data Source

PatentUS20260062793A1Crucible, evaporation source, evaporation method, evaporation system, and method of manufacturing a device
Publication Date: 2026.03.05 APPLIED MATERIALS INC
  • US20260062793A1 patent drawing
  • US20260062793A1 patent drawing
  • US20260062793A1 patent drawing

AI summary

A crucible to evaporate a material is described. The crucible includes a first material compartment configured to contain material to be evaporated, a first heater to heat the first material compartment, a second material compartment configured to contain material to be evaporated, and a second heater to heat the second material compartment. A vapor guiding compartment is provided. The vapor guiding compartment has a first opening providing a first fluid communication path between the first material compartment and the vapor guiding compartment and has a second opening providing a second fluid communication path between the second material compartment and the vapor guiding compartment. Further, the vapor guiding compartment has a third opening connectable to a vapor distributor. The crucible further includes a third heater to heat the vapor guiding compartment.