Multi-Gate FeFET Memory Cell for Multi-Bit Storage Density

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional static random access memory (SRAM) devices are volatile and consume a large area, while existing ferroelectric random access memory (FeRAM) cells can only store a single bit of data, limiting their efficiency and density.

Innovation Solution

A multi-gate ferroelectric field-effect transistor (FeFET) memory cell is developed with multiple ferroelectric layers, each having a unique switching E-field, allowing for multiple threshold voltages and enabling the storage of multiple bits in a smaller area, utilizing BEOL or MEOL processes for manufacturing flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional SRAM devices are used, then volatility is avoided (data retention), but area consumption increases significantly

Engineering Contradiction:
Improvedata retentionVSAvoidmemory cell area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The gate electrode is segmented into multiple independent gates (first gate, second gate, third gate) that can be independently controlled. This segmentation allows the memory cell to store multiple bits of data by utilizing different combinations of gate states, thereby increasing storage capacity without proportionally increasing the physical area of the memory cell.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple ferroelectric layers are stacked vertically within the gate structure, with each layer capable of independent polarization states. This nested arrangement of multiple storage elements within a single vertical column enables multi-bit storage per cell location, effectively reducing the area required per stored bit while maintaining non-volatile characteristics.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of stationary object

If single-bit FeRAM cells are used, then area is reduced, but storage capacity is limited to one bit

Engineering Contradiction:
Improvememory cell areaVSAvoidstorage capacity
Core Design Contradiction:
Area of stationary objectVSQuantity of substance

Solution Approach 1:

The gate electrode is divided into multiple independent gates (first gate, second gate, third gate) that can be independently controlled. This segmentation allows the memory cell to store multiple bits of data by utilizing different combinations of gate states, thereby increasing storage capacity without proportionally increasing the physical area of the memory cell.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a planar single-bit structure to a vertical multi-layer structure by stacking multiple ferroelectric layers and corresponding gates in the vertical dimension. This dimensional change enables multiple bits of storage within the same footprint area, effectively multiplying storage capacity without increasing lateral area consumption.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If multiple ferroelectric layers with unique switching E-fields are implemented, then multiple bits storage is enabled, but device complexity increases

Engineering Contradiction:
Improvestorage capacityVSAvoidstructure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

Multiple gates share a common source-drain region and overlapping gate structures, allowing the same physical components to serve multiple functions. The first, second, and third gates can individually control different bits of data while sharing common structural elements, thereby reducing overall device complexity compared to having completely separate structures for each bit.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention merges multiple gate structures into a unified configuration where gates overlap and share common source-drain regions. This combining of structures reduces the total number of discrete components needed while maintaining the capability to store multiple bits, thereby managing device complexity through integration rather than proliferation of separate elements.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-gate FeFET memory cell achieves efficient storage of multiple bits in a reduced area, providing a more compact and efficient memory solution compared to conventional SRAM and single-bit FeRAM cells.

Implementation Method 1

A multi-gate ferroelectric field-effect transistor (FeFET) memory cell is developed with multiple ferroelectric layers, each having a unique switching E-field, allowing for multiple threshold voltages

Methodology Applied
Scientific EffectFerroelectric polarization: Polarisation

Data Source

PatentUS20250372140A1FERROELECTRIC FIELD-EFFECT TRANSISTOR (FeFET) MEMORY
Publication Date: 2025.12.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250372140A1 patent drawing
  • US20250372140A1 patent drawing
  • US20250372140A1 patent drawing

AI summary

A memory device includes a plurality of memory cells. Each memory cell includes a multi-gate FeFET that has a first source/drain terminal, a second source/drain terminal, and a gate with a plurality of ferroelectric layers configured such that each of the ferroelectric layers has a respective unique switching E-field.