Multi-Head Substrate Processing with Electromagnetic Pad Pressing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional processing apparatuses are inefficient in processing substrates within a short period of time.
Innovation Solution
A processing apparatus equipped with multiple heads, each with a processing pad smaller than the substrate surface, and utilizing electromagnetic actuators for pressing, along with swing devices and a table rotation mechanism, allows for faster processing by distributing the workload across multiple pads.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single processing pad is used to process the substrate, then the device complexity is low, but the processing time is long
Solution Approach 1:
The single processing pad is segmented into multiple processing pads (first processing pad, second processing pad, third processing pad, fourth processing pad), each capable of independently processing different regions of the substrate. This segmentation enables parallel processing operations, thereby increasing productivity while managing device complexity through modular design
Solution Approach 2:
Multiple processing pads are merged into a single processing apparatus, with all pads operating simultaneously on different portions of the substrate. The heads holding the processing pads are integrated onto a single table that rotates during processing, combining multiple processing functions into one unified system
2Speed
If pressing mechanisms such as air cylinders are used, then the device complexity is low, but the pressing force application speed is slow
Solution Approach 1:
The mechanical pressing mechanism (air cylinder) is replaced with an electromagnetic actuator that utilizes electromagnetic force to apply pressing force to the processing pad. This substitution enables faster and more precise control of the pressing force application speed, improving the overall processing speed of the apparatus
Solution Approach 2:
The electromagnetic actuator enables periodic adjustment of the pressing force during the processing cycle, allowing for optimized pressing patterns that enhance processing efficiency while maintaining precise control over the pressing force application timing and magnitude
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables faster substrate processing by utilizing multiple pads, maintaining processing rate and ensuring uniform film thickness, thereby reducing overall processing time.
Implementation Method 1
a plurality of pressing devices each including an electromagnetic actuator configured to apply a pressing force to a corresponding one of the plurality of heads by utilizing electromagnetic force
Data Source
AI summary
Provided is a technique for processing a substrate in a short time. A processing apparatus 1 includes a table 10 configured to hold a substrate Wf such that a surface to be processed of the substrate faces upward, a table rotation device 20 configured to rotate the table, a plurality of heads 30a, 40a to each of which a processing pad Pd1, Pd2 is attached, the processing pad having an area smaller than an area of the surface to be processed of the substrate, a plurality of head rotation devices 50a, 55a, a plurality of pressing devices 60a, 65a, each of the plurality of pressing devices has an electromagnetic actuator configured to apply a pressing force to a corresponding one of the plurality of heads by utilizing electromagnetic force, and a plurality of swing devices 70a, 80a.