Multi-Head Scanning Probe Microscopy for High Throughput
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Solution Overview
Problem
Scanning probe microscopy devices, such as atomic force microscopy, face challenges with low throughput due to the slow scanning process required for high-resolution surface mapping, making them inefficient for industrial applications like semiconductor testing.
Innovation Solution
The implementation of a scanning probe microscopy device with multiple probe heads mounted on individually movable support arms, each equipped with plane actuators for parallel motion, allows for simultaneous scanning of multiple sites on a sample surface, significantly increasing throughput by enabling independent motion of each head relative to the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single microscopic probe is used for high-resolution surface mapping, then measurement precision is improved, but productivity deteriorates due to slow scanning speed
Solution Approach 1:
The system divides the measurement task into multiple independent scanning lanes, each handled by a separate probe. Multiple probes (e.g., 5-10 probes) are arranged in parallel, each scanning a distinct lane on the sample surface simultaneously. This segmentation allows the total measurement area to be covered much faster than a single probe could, while each probe maintains its high-resolution measurement capability independently.
2Productivity
If multiple probes are mounted on a single head for parallel scanning, then productivity is improved, but device complexity increases
Solution Approach 1:
Instead of one complex multi-probe head, the system segments the probing function into multiple independent probe heads. Each head contains a single probe with its own actuation and detection systems. This distributes the complexity across multiple simple, identical modules rather than concentrating it in one complex assembly, making the system easier to manufacture, calibrate, and maintain.
Solution Approach 2:
The system transitions from a single-point measurement approach to a multi-line parallel measurement approach by arranging probes in spatial distribution. Multiple probes are positioned at different locations across the sample surface, enabling simultaneous scanning of multiple lanes. This spatial dimensionality multiplication increases throughput without requiring each individual probe to operate faster or more complexly.
3Productivity
If multiple probe heads with individual actuators are used for simultaneous scanning, then productivity is improved, but device complexity increases
Solution Approach 1:
The actuation system is segmented into multiple independent actuator units, each dedicated to a specific probe head. Rather than one complex actuator controlling multiple probes, each probe has its own simplified actuator. This modular approach reduces the complexity of individual actuator designs while achieving parallel operation through replication of simple, reliable actuator-probe pairs.
Data Source
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Figure 3A~3B
AI summary
An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.