Multi-Head Substrate Transfer Device for Semiconductor Processing
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Solution Overview
Problem
Conventional substrate processing apparatuses face inefficiencies in throughput due to the time-consuming process of transferring substrates one by one, limiting the ability to increase the speed of substrate transfer devices while ensuring stable handling.
Innovation Solution
A substrate processing apparatus and method utilizing a substrate transfer device with multiple holding devices to concurrently hold and transfer multiple substrates, allowing for simultaneous loading and unloading of substrates between a transit table and processing chambers, thereby reducing transfer time and improving throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are transferred one by one by the substrate transfer device, then substrate handling stability is maintained, but transfer time becomes excessively long and throughput is reduced
Solution Approach 1:
The substrate transfer device is divided into multiple substrate holding devices (first, second, third holding devices), each capable of independently holding substrates. This segmentation allows parallel operations where multiple substrates can be transferred simultaneously, dramatically reducing total transfer time while maintaining stable handling through dedicated holding positions for each substrate
Solution Approach 2:
Multiple substrate holding devices are combined into a single integrated transfer device, enabling concurrent transfer of multiple substrates. The holding devices work in coordination to load substrates into processing chambers simultaneously, improving throughput without compromising the stability of individual substrate handling
2Loss of time
If the moving speed of the substrate transfer device is increased, then transfer time is reduced, but substrate handling stability deteriorates
Solution Approach 1:
By dividing the transfer function across multiple independent holding devices, each device can operate at optimized speeds for stable substrate holding while the collective system achieves high throughput through parallel operations, eliminating the need to increase individual device speeds
Solution Approach 2:
Substrates are pre-positioned in multiple holding devices before transfer begins, allowing the system to execute simultaneous transfers at controlled speeds. This preliminary arrangement enables parallel processing without requiring any single device to exceed stable operating speeds
Data Source
AI summary
A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N−1 number of) substrates are concurrently held by 2 to N−1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.