Multi-link Substrate Scanning Device for Uniform Ion Doping
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Solution Overview
Problem
Substrate scanning devices face challenges in achieving uniform ion implantation due to inconsistent velocity performance, leading to dose non-uniformities and undesirable substrate characteristics, necessitating improved velocity control and accuracy for efficient doping.
Innovation Solution
A multi-link substrate scanning device with a direct drive motor and gear motors is employed, featuring a first joint connected to a process chamber, a second joint with a gear motor, and a third joint with another gear motor, allowing for precise movement and orientation of the substrate holder to maintain a constant position and orientation relative to the ion beam, thereby ensuring uniform exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a substrate scanning device is used to expose the entire surface of a substrate to an ion beam, then the substrate can be uniformly doped, but velocity inconsistencies cause dose non-uniformities and reduce manufacturing precision
Solution Approach 1:
The patent applies dynamics by making the scanning device multi-linkage with multiple degrees of freedom, allowing the system to dynamically adjust its configuration during scanning. The multi-linkage mechanism with actuated joints enables real-time velocity compensation and maintains consistent substrate exposure despite changes in scanning speed, thereby achieving uniform doping across the substrate surface.
Solution Approach 2:
The patent utilizes parameter changes by actuating the joints in the multi-linkage mechanism to modify the geometric parameters of the scanning path. By changing the configuration parameters (joint angles, link positions) in response to velocity variations, the system compensates for speed inconsistencies and maintains constant velocity projection onto the substrate, ensuring uniform ion beam exposure and doping precision.
2Productivity
If the substrate is scanned quickly to improve productivity, then doping efficiency increases, but velocity fluctuations increase causing dose non-uniformities
Solution Approach 1:
The patent implements feedback control through the multi-linkage mechanism with actuated joints that respond to velocity changes. The system continuously adjusts the joint configurations based on actual scanning velocity, creating a closed-loop control system that maintains uniform substrate exposure even at high scanning speeds, thereby achieving both high productivity and precise dose uniformity.
Solution Approach 2:
By employing a dynamic multi-linkage mechanism with multiple actuated joints, the system can rapidly adjust its configuration during high-speed scanning to compensate for velocity fluctuations. This dynamic adaptation allows the substrate to be scanned quickly while maintaining consistent exposure conditions, achieving high doping efficiency without sacrificing dose uniformity.
3Ease of manufacture
If a simple scanning mechanism is used to reduce device complexity, then ease of manufacture improves, but velocity control accuracy decreases leading to dose non-uniformities
Solution Approach 1:
The patent applies segmentation by dividing the scanning mechanism into multiple independent linkages with separate actuated joints. This modular segmentation allows each joint to be controlled independently for precise velocity regulation, while the overall structure remains manufacturable through standardized mechanical components. The segmented approach enables complex velocity control without requiring an overly complicated monolithic mechanism.
Solution Approach 2:
The multi-linkage mechanism serves multiple functions: it provides the scanning motion, enables velocity control through joint actuation, and compensates for positioning errors. By making the mechanism multi-functional, the patent achieves high velocity control accuracy without proportionally increasing device complexity, as the same structural elements perform multiple control functions simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces velocity fluctuations, enabling uniform doping of substrates with improved scanning efficiency and accuracy, meeting increased manufacturing standards by maintaining consistent substrate exposure to the ion beam.
Implementation Method 1
The first joint may include a direct drive motor
Implementation Method 2
The second joint may include a first gear motor. A third joint may be coupled between a second end of the second linkage and a first end of the third linkage, and the third joint may include a second gear motor
Implementation Method 3
The energetic ions in the ion beam penetrate into the sub-surface of the substrate material and are embedded into the crystalline lattice of the substrate material to form a region of desired conductivity or material property
Data Source
AI summary
A substrate scanning device includes first, second and third linkages, and a direct drive motor coupled between a process chamber and a first end of the first linkage. A first gear motor coupled between a second end of the first linkage and a first end of the second linkage and a second gear motor coupled between a second end of the second linkage and a first end of the third linkage. A substrate support surface coupled to a second end of the third linkage. The direct drive motor for moving the substrate support surface parallel to a scan axis as the direct drive motor moves the substrate support surface along the scan axis. The first and second gear motors can be configured to maintain the substrate support surface in a plane approximately parallel with the scan axis.