Multi-thickness Interconnect Structure for Embedded Electronics

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Solution Overview

Problem

Existing semiconductor packaging technologies face challenges in efficiently providing reliable interconnect structures for both high-power and low-power semiconductor devices within the same embedded chip modules, due to divergent requirements such as different current carrying and routing density needs.

Innovation Solution

An embedded electronics package with a multi-thickness interconnect structure, featuring thick power interconnect layers through macro-vias in the substrate and thin logic interconnect layers through micro-vias in an insulating material, allowing for efficient electrical connections between power and logic semiconductor components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single interconnect structure is used for both power and logic semiconductor devices, then device integration is simplified, but the divergent current carrying and routing density requirements cannot be met

Engineering Contradiction:
Improveinterconnect structureVSAvoidcurrent carrying and routing density requirements
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The interconnect structure is segmented into two distinct types: thick interconnect layers with large vias for power semiconductor devices, and thin interconnect layers with small vias for logic semiconductor devices. This segmentation allows each interconnect type to be optimized for its specific electrical requirements while maintaining integration within a single embedded package.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the embedded package are assigned different interconnect qualities according to their functional requirements. Power device regions receive thick interconnect layers with large via structures optimized for high current carrying capacity, while logic device regions receive thin interconnect layers with small vias optimized for high routing density. This local quality differentiation resolves the contradiction between structural simplicity and requirement adaptability.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If thick interconnect layers are used for power devices, then current carrying capacity is improved, but packaging density and manufacturing complexity increase

Engineering Contradiction:
Improvecurrent carrying capacityVSAvoidpackaging density
Core Design Contradiction:
Quantity of substanceVSVolume of stationary object

Solution Approach 1:

Thick interconnect layers are applied locally only in regions where power semiconductor devices are embedded, rather than uniformly across the entire substrate. This allows the package to achieve high current carrying capacity where needed while maintaining compact dimensions in logic device regions, thus improving overall packaging density.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent utilizes vertical layering to accommodate different interconnect thicknesses within a compact planar footprint. Multiple interconnect layers are stacked vertically, with thick power interconnects and thin logic interconnects positioned in different vertical planes, allowing both to coexist without significantly increasing the horizontal package volume.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If separate processing is used for power and logic interconnect layers, then each layer can be optimized, but manufacturing complexity increases

Engineering Contradiction:
Improveinterconnect layer optimizationVSAvoidmanufacturing process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The manufacturing process is segmented into separate sequential steps for forming power interconnect layers and logic interconnect layers. This allows each layer to be processed with optimized parameters (such as copper plating thickness, via dimensions, and pattern density) while still being integrated into a single manufacturing flow, thereby achieving high precision without excessive complexity.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS10497648B2Embedded electronics package with multi-thickness interconnect structure and method of making same
Publication Date: 2019.12.03 GENERAL ELECTRIC CO
  • US10497648B2 patent drawing
  • US10497648B2 patent drawing
  • US10497648B2 patent drawing

AI summary

An embedded electronics package and method of manufacture includes a support substrate, a power semiconductor component coupled to a first side of the support substrate, and a logic semiconductor component coupled to a second side of the support substrate, opposite the first side. A first insulating material surrounds the logic semiconductor component. A logic interconnect layer is electrically coupled to the logic semiconductor component by at least one conductive micro-via extending through a portion of the first insulating material. A power interconnect layer is electrically coupled to the power semiconductor component by at least one conductive macro-via extending through a thickness of the support substrate. The power interconnect layer is thicker than the logic interconnect layer.