Multi-thickness Interconnect Structure for Embedded Electronics
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor packaging technologies face challenges in efficiently providing reliable interconnect structures for both high-power and low-power semiconductor devices within the same embedded chip modules, due to divergent requirements such as different current carrying and routing density needs.
Innovation Solution
An embedded electronics package with a multi-thickness interconnect structure, featuring thick power interconnect layers through macro-vias in the substrate and thin logic interconnect layers through micro-vias in an insulating material, allowing for efficient electrical connections between power and logic semiconductor components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single interconnect structure is used for both power and logic semiconductor devices, then device integration is simplified, but the divergent current carrying and routing density requirements cannot be met
Solution Approach 1:
The interconnect structure is segmented into two distinct types: thick interconnect layers with large vias for power semiconductor devices, and thin interconnect layers with small vias for logic semiconductor devices. This segmentation allows each interconnect type to be optimized for its specific electrical requirements while maintaining integration within a single embedded package.
Solution Approach 2:
Different regions of the embedded package are assigned different interconnect qualities according to their functional requirements. Power device regions receive thick interconnect layers with large via structures optimized for high current carrying capacity, while logic device regions receive thin interconnect layers with small vias optimized for high routing density. This local quality differentiation resolves the contradiction between structural simplicity and requirement adaptability.
2Quantity of substance
If thick interconnect layers are used for power devices, then current carrying capacity is improved, but packaging density and manufacturing complexity increase
Solution Approach 1:
Thick interconnect layers are applied locally only in regions where power semiconductor devices are embedded, rather than uniformly across the entire substrate. This allows the package to achieve high current carrying capacity where needed while maintaining compact dimensions in logic device regions, thus improving overall packaging density.
Solution Approach 2:
The patent utilizes vertical layering to accommodate different interconnect thicknesses within a compact planar footprint. Multiple interconnect layers are stacked vertically, with thick power interconnects and thin logic interconnects positioned in different vertical planes, allowing both to coexist without significantly increasing the horizontal package volume.
3Manufacturing precision
If separate processing is used for power and logic interconnect layers, then each layer can be optimized, but manufacturing complexity increases
Solution Approach 1:
The manufacturing process is segmented into separate sequential steps for forming power interconnect layers and logic interconnect layers. This allows each layer to be processed with optimized parameters (such as copper plating thickness, via dimensions, and pattern density) while still being integrated into a single manufacturing flow, thereby achieving high precision without excessive complexity.
Data Source
AI summary
An embedded electronics package and method of manufacture includes a support substrate, a power semiconductor component coupled to a first side of the support substrate, and a logic semiconductor component coupled to a second side of the support substrate, opposite the first side. A first insulating material surrounds the logic semiconductor component. A logic interconnect layer is electrically coupled to the logic semiconductor component by at least one conductive micro-via extending through a portion of the first insulating material. A power interconnect layer is electrically coupled to the power semiconductor component by at least one conductive macro-via extending through a thickness of the support substrate. The power interconnect layer is thicker than the logic interconnect layer.


