Multi-vane Throttle Valve Heat Shielding
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Solution Overview
Problem
Multi-vane throttle valves in vacuum processing systems have limited capacity to shield high-vacuum pumps from heat and debris, compromising the integrity of the vacuum seal and the operational efficiency of the pumps.
Innovation Solution
A multi-vane throttle valve design that incorporates rotatable vanes with a cooling conduit and a debris shield, along with a drive mechanism and reciprocal vane system, to provide full-range linear conductance control, protect the vacuum pump from heat and debris, and maintain vacuum seal integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multi-vane valves are used to control gas flow in vacuum systems, then precise control of processing pressure is improved, but the capacity to shield the vacuum pump from heat and debris deteriorates
Solution Approach 1:
The valve is segmented into multiple functional components: rotatable vanes for flow control, reciprocal vanes for shielding, cooling conduits for heat management, and debris shields for particle protection. Each segment performs a specific function, allowing the system to simultaneously achieve precise pressure control and pump protection.
Solution Approach 2:
The valve assembly integrates multiple functions into a single device: flow throttling control, heat shielding, debris protection, and active cooling. This multi-functional design resolves the contradiction by making the valve system capable of both precise pressure control and comprehensive pump protection without requiring separate components.
2Measurement precision
If rotatable vanes are added to provide linear conductance control, then pressure control precision is improved, but device complexity increases
Solution Approach 1:
The drive mechanism is merged into a single integrated assembly that simultaneously controls multiple rotatable vanes through a common drive shaft. This consolidation reduces the number of independent control systems needed, thereby managing device complexity while maintaining precise linear conductance control across multiple valve elements.
Solution Approach 2:
The valve employs rotatable vanes that can dynamically adjust their angular position to achieve linear conductance control across the full pressure range. This dynamic adjustment capability provides precise control without requiring multiple static valve stages, thus managing complexity while improving measurement precision.
3Temperature
If cooling conduits are integrated into the vanes, then heat shielding capability is improved, but manufacturing complexity increases
Solution Approach 1:
The cooling function is extracted as a separate conduit system that can be independently manufactured and then integrated into the vane structure. This separation allows the vanes to be fabricated using standard processes, while the cooling conduits are added through a distinct manufacturing step, thereby reducing overall manufacturing complexity while maintaining effective heat shielding.
Solution Approach 2:
Cooling conduits are integrated only in specific regions of the vanes where heat exposure is most critical, rather than throughout the entire structure. This localized approach provides effective heat shielding where needed while minimizing the complexity increase associated with integrating cooling systems throughout the entire vane assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively shields the vacuum pump from heat and debris, ensuring the integrity of the vacuum seal and enhancing the operational efficiency of the vacuum processing system by providing precise control over gas flow and temperature management.
Implementation Method 1
Each of the plurality of rotatable vanes has a cooling conduit in fluid communication with and disposed longitudinally along the rotatable vane
Implementation Method 2
A magnetic fluid seal maintains vacuum integrity between a rotating assembly and a stationary housing
Data Source
Figure 1A~1B
Figure 2~3
Figure 4
AI summary
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.