Multi-Voltage IC Isolation Structure for Leakage Blocking

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Solution Overview

Problem

Multi-voltage integrated circuits (ICs) face significant leakage current issues due to the use of isolating transistors, leading to undesirable shorting between active device regions.

Innovation Solution

The implementation of a multi-voltage IC structure with a trench isolation region and isolating transistors connected in series, biased to maintain an off state, effectively prevents leakage current and shorting between voltage domains.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If isolating transistors are used to electrically isolate active device regions, then IC size can be scaled down, but significant leakage current occurs between voltage domains

Engineering Contradiction:
ImproveIC sizeVSAvoidleakage current
Core Design Contradiction:
Volume of moving objectVSObject-generated harmful factors

Solution Approach 1:

The isolation structure is segmented into multiple components: a trench isolation region extending through the semiconductor body, multiple isolating transistors distributed along the trench, and an insulator layer. This segmentation allows each component to contribute to isolation functionality while minimizing leakage current through distributed isolation rather than relying on a single transistor.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The trench isolation region filled with insulator material serves as an intermediary structure between active device regions at different voltage domains. The isolating transistors are positioned adjacent to the trench, using the trench as a physical barrier and reference structure, thereby reducing direct leakage paths between voltage domains while maintaining compact IC size.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If a single trench isolation structure is used, then manufacturing is simple, but isolation effectiveness between multiple voltage domains is insufficient

Engineering Contradiction:
Improveisolation structure fabricationVSAvoidisolation effectiveness
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The isolation structure is segmented into multiple components: a trench isolation region extending through the semiconductor body, multiple isolating transistors distributed along the trench, and an insulator layer. This segmentation allows each component to contribute to isolation functionality while minimizing leakage current through distributed isolation rather than relying on a single transistor.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The trench isolation region serves multiple functions simultaneously: it provides physical separation between voltage domains, acts as a structural reference for positioning isolating transistors, and works in conjunction with the insulator layer to establish electrical isolation. This multi-functionality maintains manufacturing simplicity while enhancing isolation effectiveness across multiple voltage domains.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Object-generated harmful factors

If isolating transistors are biased to maintain off state, then current blocking is achieved, but saturation threshold voltage increases and saturation drain current decreases

Engineering Contradiction:
Improveleakage current blockingVSAvoidtransistor performance
Core Design Contradiction:
Object-generated harmful factorsVSPower

Solution Approach 1:

Instead of relying on a single isolating transistor that must be fully enhanced for isolation, the structure uses multiple isolating transistors distributed along the trench isolation region. Each transistor can operate with partial isolation responsibility, allowing them to maintain lower threshold voltages and higher drain currents while collectively providing sufficient isolation effectiveness through their distributed arrangement.

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS20250294877A1Isolation structure for multi-voltage integrated circuit
Publication Date: 2025.09.18 GLOBALFOUNDRIES US INC
  • US20250294877A1 patent drawing
  • US20250294877A1 patent drawing
  • US20250294877A1 patent drawing

AI summary

Disclosed are embodiments of an integrated circuit (IC) including a first IC section operating in a first voltage domain, a second IC section operating in a second voltage domain, and an isolation structure between the two sections. The isolation structure can include a trench isolation region within a semiconductor layer, isolating first PFETs and, optionally, isolating second PFETs. The isolating first PFETs can be series-connected and can include a first portion of the semiconductor layer between a functional PFET of the first IC section and a first edge of the trench isolation region. Additionally, the isolating first PFETs can operate in the first voltage domain and can be biased so as to remain always off. The isolating second PFETs can be similarly configured between a functional PFET of the second IC section and a second edge of the trench isolation region opposite the first edge.