Multi-Beam Particle Microscope Optimization via Distinct Foci
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Solution Overview
Problem
Traditional methods for operating multi-beam particle microscopes are time-consuming and prone to contamination, reducing throughput and image quality due to the need for repeated scans and the use of auxiliary beams that can cause charge accumulation and aberrations.
Innovation Solution
A method that allows for optimized focusing and stigmatization settings by generating a bundle of particle beams with distinct foci, enabling a single scan to determine optimal operating parameters for subsequent scans, minimizing contamination and improving analysis speed and precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional methods are used to determine optimal focusing and stigmatization settings by recording multiple images at different settings, then the quality of analysis is improved, but the throughput is reduced due to time-consuming repeated scans
Solution Approach 1:
The patent applies preliminary action by performing a first scan to determine optimal operating parameters (focusing and stigmatization settings) before conducting subsequent analysis scans. This preliminary characterization step allows the system to establish optimal settings in advance, enabling faster throughput during actual analysis while maintaining image quality.
Solution Approach 2:
The patent implements continuity of useful action by using the same particle beam and detection system for both characterization and analysis without requiring auxiliary beams or additional hardware. The particle beam continuously scans the object surface, first for optimization and then for analysis, eliminating idle time and maintaining productive action throughout the process.
2Measurement precision
If auxiliary beams are used to determine focusing and stigmatization settings, then the quality of settings is improved, but contamination of the object surface increases due to charge accumulation
Solution Approach 1:
The patent applies universality by making the imaging particle beam serve dual functions: both creating the image and determining the optimal focusing and stigmatization settings. This eliminates the need for separate auxiliary beams that would cause charge accumulation and contamination, while still achieving accurate optimization of beam parameters.
Solution Approach 2:
The patent merges the functions of imaging and optimization by combining the auxiliary characterization beams with the main imaging beam. The same particle beam used for analysis is also used to determine optimal settings, consolidating multiple functions into a single beam system and avoiding the harmful effects of additional beams.
3Measurement precision
If manual operation is used to focus and stigmatize particle beams, then the quality of analysis is improved through user expertise, but the time required increases significantly
Solution Approach 1:
The patent implements feedback by using the detected particle intensities from the first scan to automatically determine optimal operating parameters for focusing and stigmatization. The system analyzes the scan data and uses this feedback to set optimal parameters for subsequent scans, replacing time-consuming manual adjustment with automated feedback-driven optimization.
Solution Approach 2:
The patent applies self-service by enabling the multi-beam particle microscope to automatically optimize its own operating parameters through automated analysis of scan data. The system determines optimal focusing and stigmatization settings without requiring external manual intervention, allowing it to self-adjust and eliminate time-consuming manual operation steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases throughput, reduces contamination, and enhances the quality of analysis by allowing precise and extensive characterization of the object surface with fewer scans, maintaining or improving image quality.
Implementation Method 1
a multi-beam particle microscope includes components which are configured to generate electric and/or magnetic fields in order to manipulate the particle beams, for example deflect them or change them in terms of their form. In particular, a multi-beam particle microscope can include a particle-optical lens which focuses each or individual ones of the particle beams
Implementation Method 2
a multi-beam particle microscope can include a stigmator which can change the form of at least some of the particle beams, for example in order to correct a sub-optimal effect of another particle-optical component
Implementation Method 3
further field generators may be provided, which can generate higher-order multipole fields, for example hexapole fields, so as to be able to compensate higher-order aberrations
Data Source
AI summary
A method includes: generating a multiplicity of particle beams such that the particle beams penetrate a predetermined plane side-by-side and have within a volume region around the predetermined plane in each case one beam focus; scanning a first region of the surface of an object with the particle beams and detecting first intensities of particles produced by the particle beams while setting an operating parameter of the multi-beam particle microscope; and determining first values of an object property based on the first intensities. The first values represent the object property within the first region, and the object property represents a physical property of the object. The method also includes determining a second value of the operating parameter for use for a second region of the surface based on the first values of the object property.