Multi-Channel Gas Injection System for Focused Beam Processing
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Solution Overview
Problem
Existing Gas Injection Systems (GIS) face issues with gas shadowing effects on uneven surfaces, limited tilt capabilities, and uneven distances between nozzles and the sample, which affect gas coverage and pressure in the vacuum chamber during focused-beam processing.
Innovation Solution
The implementation of a multi-channel GIS with concentric nozzles, where one channel is connected to a positioning unit and another is detachably mounted, allowing for improved nozzle placement and mixing of gases after exit, reducing shadowing and tilt limitations, and enabling the delivery of gases with significantly different fluxes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a single nozzle is used and positioned close to the sample, then gas coverage is concentrated and background pressure is low, but gas shadowing effects occur on uneven surfaces and tilt capability is limited
Solution Approach 1:
The single nozzle is segmented into multiple nozzles (typically three nozzles arranged in a triangular pattern) that are detachably mounted on the first channel. This segmentation allows gas to be delivered from multiple directions, eliminating shadowing effects on uneven surfaces while maintaining concentrated gas coverage at the sample location.
Solution Approach 2:
The nozzles are positioned in a three-dimensional arrangement around the beam path rather than in a single plane. By distributing nozzles in multiple spatial dimensions (e.g., triangular arrangement with vertices at different positions), the system achieves omnidirectional gas coverage that accommodates sample tilt in multiple axes without creating shadowing zones.
2Object-affected harmful factors
If two opposing nozzles are used, then gas shadowing is avoided, but the distance between nozzles must be large enough to let the beam pass, reducing nozzle proximity to sample
Solution Approach 1:
Each nozzle is positioned locally optimized for its specific function, with individual positioning units that allow independent adjustment of each nozzle's location and orientation. This enables each nozzle to be placed as close as possible to the sample while maintaining the overall geometric arrangement that prevents shadowing, as each nozzle contributes to gas coverage from its specific local position.
3Stability of the object's composition
If multiple nozzles are used for gas delivery, then gas coverage uniformity is improved, but device complexity increases
Solution Approach 1:
The first channel with positioning unit serves as a universal platform that can accommodate different nozzle configurations and types. The positioning unit can adjust any nozzle to any required position and orientation, making the system universally adaptable to various experimental requirements without requiring separate dedicated mechanisms for each nozzle, thereby reducing overall complexity.
Solution Approach 2:
The nozzles are nested on the first channel in a hierarchical structure where multiple nozzles are mounted on a single positioning platform. This nesting allows all nozzles to be controlled by a single positioning unit, reducing the number of independent control systems needed and simplifying the overall device architecture while maintaining the ability to deliver uniform gas coverage.
4Productivity
If nozzles are positioned close to the sample, then gas delivery efficiency is high, but tilt capability is limited by nozzle-sample distance changes
Solution Approach 1:
The positioning unit is designed with dynamic adjustment capabilities that allow real-time modification of nozzle positions and orientations in response to sample tilt. The nozzles can be dynamically repositioned to maintain optimal spacing and angles relative to the tilted sample surface, preserving gas delivery efficiency across the full range of tilt angles without requiring large fixed distances.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes gas shadowing, enhances gas coverage uniformity, allows for closer nozzle placement to the sample, and facilitates the production of high-purity, dense metal structures with reduced processing time by ensuring consistent gas delivery and efficient removal of contaminants like carbon.
Implementation Method 1
allowing mixing of gases after exit, reducing shadowing and tilt limitations, and enabling the delivery of gases with significantly different fluxes
Implementation Method 2
one channel is connected to a positioning unit for positioning the GIS, allowing for improved nozzle placement
Implementation Method 3
another channel is detachably mounted on the first channel, allowing for improved nozzle placement and mixing of gases after exit
Data Source
Figure 1~2
Figure 3
Figure 4~500c
AI summary
The invention relates to a Gas Injection System (GIS) for applying at least two fluids in the vacuum chamber of a particle-optical apparatus, the gas injection system having two or more channels(102, 110), each channel connected to an associated reservoir holding a fluid at a first side and having an associated exit opening at the other side, the exit sides individually exiting to the outside of the GIS via a nozzle with a nozzle opening, characterized in that at least two exit openings (106, 108) are separated by less than the diameter of the channels near the exit openings, preferably concentric to each other. The invention further relates to the use of said GIS in which the central nozzle directs a high flux of, for example, oxygen while the outer concentric nozzle directs a metal precursor, for example MeCpPtMe3, to the sample with a flux that is less than two orders of magnitude less. By the high flux of oxygen a purified metal is deposited in a one-step deposition method. The nozzle can be formed as an add-on nozzle so that an existing GIS can be upgraded. The nozzle is preferably manufactured by a 3-D printing technique using for example titanium.