Multi-Gate GaN Transistor for High-Voltage RF Switches

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Solution Overview

Problem

Current silicon on insulator (Si RF SOI) and gallium arsenide (GaAs) pseudomorphic High Electron Mobility Transistors (pHEMT) used in radio frequency switches have high on-resistance and large parasitics, which are detrimental to performance and power efficiency, especially when handling high breakdown voltages.

Innovation Solution

A multi-gate gallium nitride (GaN) transistor architecture is employed, utilizing a 2D electron gas channel to achieve lower on-resistance by distributing the high gate voltage across multiple gates, thereby reducing contact resistance and enabling efficient operation with limited supply voltages found in mobile systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If multiple transistors are stacked in series to handle high breakdown voltage, then voltage handling capability is improved, but on-resistance increases

Engineering Contradiction:
Improvebreakdown voltage handlingVSAvoidon-resistance
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent divides the single high-voltage transistor into multiple lower-voltage transistor stages connected in series. Each stage handles a portion of the total voltage, reducing the voltage burden on each individual transistor while maintaining overall high-voltage capability. This segmentation allows each transistor to operate at lower voltage stress, thereby reducing on-resistance compared to using a single high-voltage transistor.

Inventive Principle:
Principle #1Segmentation

2Reliability

If large transistor width is used to reduce on-resistance, then on-resistance is improved, but parasitic capacitance increases

Engineering Contradiction:
Improveon-resistanceVSAvoidparasitic capacitance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent segments the total current path into multiple parallel transistor channels. Each transistor operates at a moderate width, avoiding the excessive parasitic capacitance of a single wide transistor, while the combined parallel channels achieve the low total on-resistance needed for high-performance RF switching.

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If high gate voltage is applied to keep channel off-state, then switching control is improved, but power consumption increases

Engineering Contradiction:
Improveswitching controlVSAvoidpower consumption
Core Design Contradiction:
Ease of operationVSUse of energy by moving object

Solution Approach 1:

The patent divides the total gate voltage requirement across multiple transistor gates in series. Each gate operates at a lower voltage level, reducing the total power consumption while maintaining effective switching control through the stacked configuration.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-gate GaN transistor design significantly reduces on-resistance compared to Si RF SOI and GaAs transistors, improving performance and power efficiency while accommodating the limited supply voltages in mobile systems.

Implementation Method 1

utilizing a 2D electron gas channel to achieve lower on-resistance

Methodology Applied
Scientific Effect2D electron gas conduction: Conduction (electrical)

Implementation Method 2

a polarization layer located between the first gate electrode and the second gate electrode

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10777672B2Gallium nitride transistors for high-voltage radio frequency switches
Publication Date: 2020.09.15 INTEL CORP
  • US10777672B2 patent drawing
  • US10777672B2 patent drawing
  • US10777672B2 patent drawing

AI summary

Embodiments of this disclosure are directed to a multi-gate gallium nitride (GaN) transistor and methods of making the same. The multi-gate GaN transistor includes a gallium nitride layer. The GaN transistor includes two or more gate electrodes between a drain electrode and a source electrode. A polarization layer is located between the first gate electrode and the second gate electrode, the polarization layer forming a two dimensional electron gas (2DEG) within the GaN layer, the 2DEG electrically coupling the first gate electrode and the second gate electrode.