Multi-layer End Effector for Flexible Substrate Handling
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Solution Overview
Problem
Existing end effectors for holding substrates, such as wafers, are thick and difficult to produce, and struggle to accommodate closely spaced or flexible substrates without damaging them during handling.
Innovation Solution
A thin and lightweight end effector design featuring a main body composed of multiple layers, where at least one layer is not inherently stable, with a fluid channel for vacuum or pressure operation, allowing for reduced thickness and enhanced flexibility in substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional end effector with a milled vacuum channel and cover is used, then the substrate can be held through vacuum technology, but the end effector becomes thick and troublesome to produce
Solution Approach 1:
The end effector is divided into multiple separate layers (first layer, second layer, third layer) that are assembled together. The fluid channel is formed by a groove in one layer rather than being milled through the entire component, simplifying manufacturing of individual parts while maintaining vacuum holding capability through the assembled structure.
Solution Approach 2:
Multiple functional layers are combined into a single assembled structure. The first layer provides structural support, the second layer contains the groove for fluid channel formation, and the third layer completes the vacuum seal. This merging of separate simple components achieves the function of a traditionally complex milled component.
2Quantity of substance
If wafers are disposed at very small spacing to accommodate maximum number in cartridge, then wafer capacity increases, but the end effector cannot be reliably guided between wafers without damaging them
Solution Approach 1:
The end effector utilizes thin film structures (particularly the second layer with the groove) that provide flexibility and compliance. This allows the end effector to adapt to closely spaced wafers without rigid contact that would cause damage, while still maintaining effective vacuum engagement for reliable wafer handling.
3Adaptability or versatility
If the end effector thickness is reduced to handle flexible substrates, then substrate compatibility improves, but the structural stability of the end effector decreases
Solution Approach 1:
The end effector is constructed as a composite of multiple layers with different properties. The first layer provides structural stability, the second layer with the groove provides fluid channel functionality and flexibility, and the third layer completes the assembly. This composite structure achieves both thinness for substrate compatibility and stability through the combined layers.
Solution Approach 2:
The fluid channel is formed by a groove in the second layer rather than by reducing the overall thickness of a solid component. This dimensional approach (creating the channel through a groove rather than by thinning the entire structure) maintains structural stability while achieving the necessary thin profile for handling flexible substrates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multi-layer design provides stability and ease of production while enabling reliable handling of substrates with reduced thickness, accommodating closely spaced or flexible substrates without damage, and simplifying assembly and sealing processes.
Implementation Method 1
Suction can be applied to the wafer and it can be held by means of vacuum technology through openings in the cover
Implementation Method 2
the end effector is first moved between two wafers in the cartridge and is moved or brought into connection with one of the wafers in order to fix said wafer, e.g. by means of a vacuum or by means of excess pressure using the Bernoulli effect
Data Source
AI summary
An end effector for holding substrates has a multi-layered main body and a fluid channel which is provided in the main body. The main body has a receiving end and a fastening end, and include at least two layers, wherein at least one of the layers is not inherently stable, and is formed from a synthetic material film.