Multilayer Structure Inspection via Side-Illuminated Scattered Light
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Solution Overview
Problem
Conventional inspecting apparatuses cannot accurately determine the position and layer of a foreign body within a multilayer structure in displays, such as LCDs and OLEDs, as they can only detect defects on the surface or within the structure but not specifically identify the layer of occurrence.
Innovation Solution
An inspecting apparatus with a stage, a first light irradiation unit that provides light to specific side surfaces of the multilayer structure, an image capture unit to receive scattered light, and a control unit to analyze the image information and detect foreign bodies, allowing for precise identification of defects and their location within the multilayer structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional camera-based inspection method is used to detect foreign bodies in a multilayer structure, then the inspection process is simple and fast, but the system cannot identify the specific layer or precise position of the foreign body within the multilayer structure
Solution Approach 1:
The inspection system is segmented into multiple independent light irradiation units, each responsible for illuminating a specific layer of the multilayer structure. This segmentation allows the system to determine which layer contains a foreign body by identifying which light source's scattered light corresponds to the detected defect, thereby achieving layer-specific detection without requiring a single complex imaging system.
Solution Approach 2:
Scattered light serves as an intermediary carrier that conveys information about the foreign body's location. Each light irradiation unit provides light that scatters off the multilayer structure, and the image capture unit receives this scattered light to generate images. The scattered light acts as a mediator that enables indirect detection of foreign body positions and layers through the relationship between light sources and detected scatter patterns.
2Loss of information
If multiple light sources are used to illuminate different layers of the multilayer structure, then the position and layer of foreign bodies can be accurately identified, but the device complexity and number of components increase
Solution Approach 1:
The image capture unit is designed as a universal component that can receive scattered light from multiple different light irradiation units simultaneously. This multi-functional image capture unit serves all light sources, eliminating the need for separate detection systems for each layer. The control unit also performs multiple functions by managing both the coordination of multiple light sources and the analysis of scattered light patterns to determine foreign body locations.
Solution Approach 2:
Multiple light irradiation units are merged into a single inspection system that operates cooperatively. Instead of using separate inspection systems for each layer, the patent combines multiple light sources that illuminate different layers simultaneously, with their scattered light being captured by a single image capture unit. This merging reduces the total number of components compared to having independent inspection systems for each layer.
3Reliability
If conventional image capture methods are used, then the inspection process is fast, but the system cannot determine whether the foreign body exists on the surface or within the multilayer structure
Solution Approach 1:
The system performs preliminary actions by having multiple light irradiation units simultaneously illuminate different layers of the multilayer structure before the actual detection occurs. This preliminary illumination of all layers allows the scattered light from potential foreign bodies at any depth to be captured in a single imaging operation, eliminating the need for sequential layer-by-layer inspection and maintaining fast inspection speeds while improving detection reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection of foreign bodies and their positions within the multilayer structure, reducing inspection time and improving the reliability of defect identification in display manufacturing processes.
Implementation Method 1
provides light to a first side surface of the first layer or a first side surface of the second layer... scattered light includes the light which is provided from the first light irradiation unit and is scattered within the multilayer structure
Data Source
AI summary
An inspecting apparatus includes: a stage including a top surface on which a multilayer structure comprising a first layer and a second layer is placed; a first light irradiation unit which faces a first side surface of the multilayer structure and provides light to a first side surface of the first layer or a first side surface of the second layer; an image capture unit which is on the stage, receives scattered light from the multilayer structure and generates image information of the multilayer structure from the received scattered light, and a control unit which detects foreign body information of the multilayer structure based on the image information of the multilayer structure. The scattered light comprises the light which is provided from the first light irradiation unit and is scattered within the multilayer structure.