Multilayer Strain Gauge for High Gauge Factor and Stable TCR

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Solution Overview

Problem

Existing strain gauges face challenges in achieving a gauge factor of 10 or more while being insusceptible to temperature changes, as they often have unstable resistance coefficients due to variations in production processes.

Innovation Solution

A strain gauge with a multilayer structure comprising a Cr—Fe alloy first layer and a Cr-M alloy or Cr second layer, where both layers have a bcc structure, allowing for a gauge factor of 10 or more and a temperature coefficient of resistance within ±1000 ppm/°C, achieved by adjusting the thickness balance without requiring a diffusion barrier layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a thin-film resistor with chromium and controlled orientation is used to achieve high gauge factor, then the gauge factor can be 10 or more, but the temperature coefficient of resistance becomes highly sensitive to production process variations

Engineering Contradiction:
Improvegauge factorVSAvoidtemperature coefficient stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent uses a multilayer composite structure consisting of a Cr-Fe alloy layer and a Cr-M alloy layer. This composite material approach allows the first layer to provide high gauge factor through controlled chromium orientation, while the second layer compensates for temperature effects, achieving both high measurement precision and temperature stability simultaneously.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the compositional parameters by introducing iron into the chromium alloy and selecting specific Cr-M alloys for the second layer. By adjusting the composition ratios and controlling the crystal orientation parameters during fabrication, the patent achieves a gauge factor of 10 or more while maintaining temperature coefficient stability within ±1000 ppm/°C.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If heat treatment is optimized to control chromium orientation for high gauge factor, then the gauge factor increases, but the production process becomes more complex and less stable

Engineering Contradiction:
Improvegauge factorVSAvoidproduction process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Instead of relying solely on complex heat treatment processes to achieve both high gauge factor and stability, the patent uses a composite material approach where the multilayer structure inherently provides the desired properties. This reduces production process complexity while maintaining high measurement precision.

Inventive Principle:
Principle #40Composite materials

3Reliability

If a multilayer structure with positive and negative temperature coefficient materials is used, then temperature stability is improved, but the gauge factor remains below 5

Engineering Contradiction:
Improvetemperature stabilityVSAvoidgauge factor
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent changes the material parameters by using Cr-Fe alloy with specific composition ratios and controlling the crystal orientation to achieve (110) bcc structure. This allows the first layer to provide a gauge factor of 10 or more while the second layer provides positive temperature coefficient to compensate for the negative TCR of the first layer, achieving both high gauge factor and temperature stability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The strain gauge achieves a stable gauge factor of 10 or more and temperature coefficient of resistance within ±1000 ppm/°C, ensuring high accuracy and insensitivity to temperature fluctuations.

Implementation Method 1

a strain gauge including a strain resistor having a multilayer structure including a first layer composed of a Cr—Fe alloy and a second layer composed of Cr or a Cr-M alloy of Cr and M

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 2

a first layer composed of a Cr—Fe alloy and a second layer composed of Cr or a Cr-M alloy... a gauge factor Gf of 10 or more and a temperature coefficient of resistance TCR in the range of ±1000 ppm/° C.

Methodology Applied
Scientific EffectTemperature coefficient of resistance compensation: Thermo-resistive Effect

Data Source

PatentUS20250347506A1Strain gauge and sensor
Publication Date: 2025.11.13 ALPS ALPINE CO LTD
  • US20250347506A1 patent drawing
  • US20250347506A1 patent drawing
  • US20250347506A1 patent drawing

AI summary

A strain gauge includes a strain resistor having a multilayer structure including a first layer composed of a Cr—Fe alloy and a second layer composed of Cr or a Cr-M alloy of Cr and M, M being at least one element selected from the group consisting of Fe, Nb, Mo, Ta, and W. The first layer and the second layer may each have a bcc structure. The amount of Fe added in the Cr—Fe alloy constituting the first layer may be 0.8 at. % or more and 11.2 at. % or less. When the second layer is composed of a Cr-M alloy but with M being other than Fe, the amount of M added may be more than 0 at. % and 7.7 at. % or less.