Multilayer Wire Aberration Corrector for Electron Microscopes
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Solution Overview
Problem
Existing aberration correctors for electron microscopes face challenges in achieving high position accuracy, wide aberration correction range, easy control, and low cost, particularly due to limitations in multipole field intensity and spatial restrictions in wire-type correctors.
Innovation Solution
A multilayer wire aberration corrector design where current line groups are arranged at different radii to independently excite multipole fields of varying orders and intensities, allowing for optimized power source control and increased multipole field intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a single-layer wire type aberration corrector is used to reduce cost, then manufacturing cost decreases, but the multipole field intensity is limited and the range of applicable conditions is narrowed
Solution Approach 1:
The patent transitions from a single-layer wire arrangement to a multi-layer wire arrangement, adding the dimensional aspect of layer stacking. Multiple current lines are arranged in different layers at different radii from the central axis, enabling independent control of multipole fields with different orders and intensities, thereby overcoming the intensity limitation of single-layer designs while maintaining cost-effectiveness
Solution Approach 2:
The patent segments the current lines into multiple groups arranged in different layers, with each layer containing current lines at specific radii. This segmentation allows independent excitation of multipole fields from different layers, enabling flexible control over field intensity and order while maintaining manufacturing simplicity
2Reliability
If multiple multipole fields are excited by superimposing fields with different current amounts and sensitivities using the same power source, then aberration correction is achieved, but strict specification of control accuracy of the power source is required
Solution Approach 1:
The patent segments the power source control into multiple independent channels, with each layer or current line group having its own power source. This allows each multipole field to be excited independently with optimized current amounts and sensitivities, eliminating the need for strict control accuracy specifications across a single power source while maintaining high aberration correction accuracy
3Ease of manufacture
If wire type aberration corrector is used instead of wedge type poles to reduce manufacturing complexity, then ease of manufacture improves, but mechanically high position accuracy becomes difficult to achieve
Solution Approach 1:
The patent compensates for the lower inherent position accuracy of wire-type structures by introducing multiple layers at different radii. The multi-layer configuration provides redundant positioning capabilities and allows for better overall geometric control, offsetting the difficulty of achieving high position accuracy in individual wire elements while maintaining manufacturing simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design provides a wide aberration correction range, easy control, and highly accurate aberration correction while reducing manufacturing costs, overcoming the limitations of single-layer wire correctors.
Implementation Method 1
a first current line group which is arranged parallel to an optical axis at a position separated by a first radius from a central axis and excites a first multipole field; and a second current line group which is arranged parallel to an optical axis at a position separated by a second radius longer than the first radius and independently excites a second multipole field
Data Source
AI summary
In order to provide an aberration corrector with a wide aberration correction range, easy control, highly accurate aberration correction, and a low cost, an aberration corrector, passing an electron beam through a central axis 201, includes a first current line group (101 to 112) which is arranged parallel to an optical axis at a position separated by R1 from the central axis, and excites a first multipole field, and a second current line group (21 to 32) which is arranged parallel to the optical axis at a position separated by R2 from the central axis, and independently excites a second multipole field having an order and intensity different from those of the first multipole field.