Multiple Select Gate Architecture With Different Lengths

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Solution Overview

Problem

As flash memory device sizes decrease, issues such as increased leakage current and program disturb arise due to gate-induced drain leakage (GIDL), which can lead to unintended programming of unselected cells during programming operations, and punch-through remains a concern even with multiple select gates.

Innovation Solution

The implementation of a multiple select gate architecture where source and drain select gates have different lengths, reducing GIDL by adjusting channel voltages and lengths to inhibit programming of unselected cells and minimizing punch-through during read operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If device size is decreased to increase memory density, then memory density is improved, but leakage current increases

Engineering Contradiction:
Improvememory densityVSAvoidleakage current
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The select gate is divided into multiple segmented gates (first select gate and second select gate) along the channel length. This segmentation allows each gate to be optimized independently, with the first gate having a shorter length to reduce GIDL and the second gate having a longer length to provide sufficient blocking capability, thereby reducing overall leakage current while maintaining high memory density

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the select gate structure are assigned different gate lengths tailored to their specific functional requirements. The first select gate region uses a shorter length optimized for reducing GIDL in high-density areas, while the second select gate region uses a longer length optimized for blocking leakage current, achieving local optimization of the harmful effects without compromising overall device performance

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If channel length is reduced to increase memory density, then memory density is improved, but GIDL increases

Engineering Contradiction:
Improvememory densityVSAvoidGIDL
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The select gate is segmented into multiple gates with different lengths. The first select gate has a shorter channel length optimized to reduce GIDL effects, while the second select gate has a longer channel length to provide adequate blocking. This segmentation allows the first gate to minimize GIDL generation while the second gate ensures sufficient current blocking, enabling high memory density without excessive GIDL

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The gate length parameter is varied along the channel direction, with the first select gate having length L1 and the second select gate having length L2 where L1 < L2. This parameter change optimizes the balance between GIDL reduction (shorter gate) and blocking capability (longer gate), allowing high memory density while controlling GIDL effects

Inventive Principle:
Principle #35Parameter changes

3Object-generated harmful factors

If multiple select gates are used to reduce GIDL, then leakage current is reduced, but punch-through risk remains

Engineering Contradiction:
Improveleakage currentVSAvoidpunch-through risk
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

Different select gate regions are assigned different lengths based on their local functional requirements. The first select gate uses a shorter length optimized for GIDL reduction where GIDL is most problematic, while the second select gate uses a longer length optimized for preventing punch-through where higher blocking is needed, achieving both leakage reduction and punch-through protection

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces GIDL and minimizes the risk of program disturb and punch-through, enhancing the reliability and performance of flash memory devices by controlling channel voltages and lengths of select gates.

Implementation Method 1

gate induced drain leakage (GIDL) that results from the depletion at the drain surface below the gate-drain overlap region

Methodology Applied
Scientific EffectGate-induced drain leakage (GIDL): Electric Field

Implementation Method 2

during a read operation punch-through may still be a concern even with multiple select gates

Methodology Applied
Scientific EffectPunch-through: Electric Field

Data Source

PatentUS7729171B2Multiple select gate architecture with select gates of different lengths
Publication Date: 2010.06.01 MICRON TECHNOLOGY INC
  • US7729171B2 patent drawing
  • US7729171B2 patent drawing
  • US7729171B2 patent drawing

AI summary

The invention provides methods and apparatus. A portion of a memory array has a string of two or more non-volatile memory cells, a first select gate coupled in series with one non-volatile memory cell of the string of two or more non-volatile memory cells, and a second select gate coupled in series with the first select gate. A length of the second select gate is greater than a length of the first select gate.