Single-Substrate Multispectral Photodetector Array for UV-to-LWIR Sensing

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Solution Overview

Problem

Conventional multispectral photodetector arrays require complex electrical interconnection of separate substrates for detecting different wavelength ranges, limiting their efficiency and practicality.

Innovation Solution

A method to manufacture photodetector arrays on a single substrate using a layer of two-dimensional layered material for both thermal and quantum photodetectors, with a pyroelectric material for LWIR detection and a semiconducting photoactive layer for UV, VIS, NIR, and SWIR detection, allowing for simultaneous operation across a wide wavelength range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If separate substrates are used for detecting different wavelength ranges, then detection capability across multiple spectral ranges is achieved, but device complexity and electrical interconnection requirements increase

Engineering Contradiction:
Improvedetection capabilityVSAvoidelectrical interconnection
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines thermal photodetector and quantum photodetector arrays onto a single substrate, eliminating the need for separate substrates and complex electrical interconnections. The shared substrate integrates both detection types while maintaining their distinct functional characteristics for different wavelength ranges.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single substrate serves multiple functions by supporting both thermal photodetectors for LWIR detection and quantum photodetectors for shorter wavelength detection. This multi-functional approach allows one substrate to replace what previously required multiple specialized substrates.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Device complexity

If a single substrate is used for both thermal and quantum photodetectors, then device complexity is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvesubstrate arrangementVSAvoidlayer deposition
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The substrate is divided into distinct first and second areas, with the two-dimensional layered material selectively positioned over specific regions. This segmentation allows different photodetector types to be manufactured on the same substrate without interference, maintaining manufacturing feasibility while reducing overall device complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The two-dimensional layered material is deposited only in specific local regions (first area for thermal photodetectors, second area for quantum photodetectors) rather than uniformly across the entire substrate. This localized deposition approach enables precise control over detector type and function in different regions.

Inventive Principle:
Principle #3Local quality

3Quantity of substance

If two-dimensional layered material is used for both photodetector types, then material efficiency is improved, but detection wavelength range differentiation becomes more challenging

Engineering Contradiction:
Improvetwo-dimensional material usageVSAvoidwavelength detection
Core Design Contradiction:
Quantity of substanceVSAdaptability or versatility

Solution Approach 1:

The two-dimensional layered material is segmented into different configurations: a first layer for thermal photodetectors and a second layer for quantum photodetectors. This segmentation allows the same material type to serve different detection functions by varying its structural arrangement and associated components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite structures where two-dimensional layered material is combined with different photodetector architectures (thermal vs. quantum). The composite approach allows a single material type to enable multiple detection mechanisms across different wavelength ranges through structural differentiation.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient detection of radiation across a broad spectrum from UV to LWIR on a single substrate, reducing complexity and improving sensitivity and reliability by using a shared layer of two-dimensional material for both thermal and quantum photodetectors.

Implementation Method 1

a first sensor for detecting long-wavelength infrared radiation, wherein the at least one first sensor is a thermal photodetector

Methodology Applied
Scientific EffectPyroelectric effect: Pyroelectric Effect

Implementation Method 2

a second sensor for detecting radiation at wavelengths shorter than long-wavelength infrared, wherein the at least one second sensor is a quantum photodetector

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS11852536B2Multispectral photodetector array
Publication Date: 2023.12.26 EMBERION OY
  • US11852536B2 patent drawing
  • US11852536B2 patent drawing
  • US11852536B2 patent drawing

AI summary

A photodetector array comprising at least one first sensor and at least one second sensor on the horizontal surface of the array substrate. The at least one first sensor is sensitive to radiation in a first wavelength range which comprises long-wavelength infrared wavelengths, and the at least one second sensor is sensitive to radiation in a second wavelength range which comprises wavelengths shorter than long-wavelength infrared. The array substrate comprises a vertical cavity on its horizontal surface, and the first sensor comprises a layer of pyroelectric material (65) which extends horizontally across the vertical cavity in the first area. A first part of a layer of two-dimensional layered material at least partly covers the layer of pyroelectric material (65), and a second part of the layer of two-dimensional layered material at least partly covers the foundation of the second sensor.