Spectrum Investigation TRIZ Cases
- Multi-spectral methods and systems for day and night sensing of greenhouse gas sources from space
See how a multi-spectral imaging sensor uses SWIR and MWIR bands with passive cooling to enable
- Multi-spectral methods and systems for day and night sensing of greenhouse gas sources from space
See how filter arrays replace complex spectrometers to enable day and night greenhouse gas sens
- Ice Nucleating Particle Spectrometer with Optical Freezing Detection
See how optical monitoring of droplet freezing and controlled cooling rates improve INP tempera
- Reflective Radical Density Scanning in Plasma Process Chambers
A moving wall and single-port optical absorption setup scan radical density in plasma chambers without process interruption, improving spatial resolution.
- Plasma Spectrum Sensor Layout for Uniformity Control in Etching
Multi-point spectral sensing tracks plasma uniformity and density more precisely than viewing ports, enabling tighter semiconductor process control.
- Spectral Channel Splicer for Angular Dispersion Compensation
Reflectors and diffraction gratings overlap wider spectral laser channels while compensating angular dispersion to preserve beam quality at higher power.
- Fabry-Perot Filter Ground Path for Low-Crosstalk Light Detection
A low-resistance ground path diverts filter current away from the detector, cutting crosstalk noise and improving signal response speed.
- On-Chip Spectrometer for Abnormal Battery Condition Detection
Voltage-tuned photodetection replaces bulky moving optics, enabling compact spectral monitoring of battery cells for abnormal conditions.
- Single-Window Radical Monitoring for Plasma Chamber Uniformity
Mirror-controlled optical paths use one chamber window to detect radical distribution and support uniform plasma cleaning across larger wafers.