Multi-Point Plasma Spectral Sensor Layout for Density Control
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Solution Overview
Problem
Existing methods for analyzing plasma characteristics in plasma processing chambers are limited to one-dimensional optical emission spectroscopy, primarily used for end-point detection, and lack the capability for comprehensive, multi-dimensional analysis.
Innovation Solution
A sensor apparatus with multiple sensors spaced apart to detect plasma characteristics, including a wavelength selector and spectrometer to analyze light emitted from the plasma, and a battery to supply power, enabling active control of plasma density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple sensors with batteries are installed between substrates to detect plasma characteristics at multiple points, then measurement precision and plasma density control capability are improved, but device complexity increases
Solution Approach 1:
The sensor apparatus is segmented into multiple independent sensor units, each capable of detecting plasma characteristics at specific locations. These segmented sensors are arranged between the first and second substrates at different positions, enabling multi-point detection without requiring a single complex centralized system.
Solution Approach 2:
The detection capability is extended from one-dimensional (single point) to two-dimensional (multiple points between substrates) by placing sensors in the vertical dimension between the first and second substrates. This spatial arrangement enables comprehensive plasma characterization throughout the process chamber volume.
2Reliability
If a battery is integrated into each sensor to supply power independently, then operational reliability is improved, but manufacturing complexity increases
Solution Approach 1:
Each sensor unit is equipped with its own battery, enabling self-powered operation without requiring external power supply infrastructure. This self-service approach ensures that each sensor can independently detect and report plasma characteristics, maintaining operational reliability even if other sensors fail.
Solution Approach 2:
The battery-integrated sensor design creates a universal module that combines power supply, detection, and data transmission functions in a single self-contained unit. This multi-functional design simplifies the overall system architecture despite increasing individual component complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor apparatus effectively detects plasma characteristics at multiple points, allowing for active control of plasma density, thereby improving the precision and efficiency of plasma processing in semiconductor manufacturing.
Implementation Method 1
a wavelength selector on which light emitted from the plasma is incident and that is configured to separate wavelengths of a spectrum of the light
Implementation Method 2
a spectrometer that is optically connected to the wavelength selector and that is configured to detect the spectrum for each separated wavelength
Implementation Method 3
a battery connected to the sensing assembly and configured to supply first power to the sensing assembly
Implementation Method 4
light emitted from the plasma
Data Source
AI summary
A sensor apparatus for analyzing plasma in a plasma processing chamber, includes: a first substrate; a second substrate on the first substrate; and a plurality of sensors between the first substrate and the second substrate, the plurality of sensors being spaced apart from each other, wherein each of the plurality of sensors includes: (a) a sensing assembly that includes: (i) a wavelength selector on which light emitted from the plasma is incident and that is configured to separate wavelengths of a spectrum of the light, and (ii) a spectrometer that is optically connected to the wavelength selector and that is configured to detect the spectrum for each separated wavelength; and (b) a battery connected to the sensing assembly and configured to supply first power to the sensing assembly.