NAND Memory Charge-Passage Structure for Retention and Erase Balance

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Solution Overview

Problem

Existing NAND architecture faces challenges in achieving optimal charge-trapping probability and rate while preventing undesired back-migration of charges, which affects both data retention and erase operations.

Innovation Solution

The integration of bandgap-engineered charge-passage structures within the insulative material between charge-storage structures and channel material, featuring a central region with lower charge-trapping probability and rate compared to the first and second regions, helps in addressing these challenges.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If charge-storage structures are integrated closer to channel material to improve memory density, then storage capacity increases, but charge leakage and back-migration increase

Engineering Contradiction:
Improvememory densityVSAvoidcharge leakage
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The insulative material is segmented into multiple layers with different dielectric properties. The first insulative layer has higher effective oxide thickness to prevent charge leakage, while the second insulative layer has lower effective oxide thickness to enable efficient erase operations. This segmentation allows the system to simultaneously achieve both charge retention and efficient erasure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the insulative structure are assigned different dielectric qualities. The first insulative layer uses a dielectric material with higher effective oxide thickness specifically at the interface with channel material to prevent charge leakage, while the second layer uses a dielectric material with lower effective oxide thickness to facilitate charge removal during erase operations.

Inventive Principle:
Principle #3Local quality

2Speed

If tunnel barrier thickness is reduced to improve programming efficiency, then charge injection speed increases, but charge leakage increases

Engineering Contradiction:
Improveprogramming speedVSAvoidcharge leakage
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The tunnel barrier is segmented into a first tunnel barrier layer and a second tunnel barrier layer with different thicknesses. The first tunnel barrier layer has greater thickness to prevent charge leakage, while the second tunnel barrier layer has lesser thickness to enable efficient charge injection during programming operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the tunnel barrier structure are assigned different thicknesses. The first tunnel barrier layer has greater thickness specifically where charge retention is critical, while the second tunnel barrier layer has lesser thickness where charge injection efficiency is prioritized.

Inventive Principle:
Principle #3Local quality

3Reliability

If effective oxide thickness is increased to prevent charge back-migration, then data retention improves, but erase operation efficiency decreases

Engineering Contradiction:
Improvedata retentionVSAvoiderase operation efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The insulative material is divided into two distinct layers: the first insulative layer with higher effective oxide thickness to prevent charge back-migration and ensure data retention, and the second insulative layer with lower effective oxide thickness to enable efficient erase operations by allowing charge removal.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the insulative structure are assigned different effective oxide thicknesses. The first insulative layer has higher effective oxide thickness where charge retention is critical, while the second insulative layer has lower effective oxide thickness where erase operation efficiency is prioritized.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the effective oxide thickness to prevent charge leakage while enabling efficient removal of deeply-trapped charges during erase operations, thereby improving the operational characteristics of NAND memory cells.

Implementation Method 1

A charge-passage structure extends vertically along the insulative material. The charge-passage structure may comprise a central region sandwiched between a first region and a second region. The central region may have a lower probability of trapping charges and/or a lower rate of trapping charges

Methodology Applied
Scientific EffectQuantum tunneling:

Implementation Method 2

a first tunnel barrier layer and a second tunnel barrier layer. The first tunnel barrier layer may have a greater thickness than the second tunnel barrier layer

Methodology Applied
Scientific EffectTunneling:

Data Source

PatentEP3571720B1Memory cells, integrated structures and memory arrays
Publication Date: 2025.02.26 MICRON TECHNOLOGY INC
  • EP3571720B1 patent drawingFigure 1
  • EP3571720B1 patent drawingFigure 2~3
  • EP3571720B1 patent drawingFigure 4~6

AI summary

Some embodiments include a memory cell which has, in the following order; a control gate, charge-blocking material, charge- trapping material, a first oxide, a charge-passage structure, a second oxide, and channel material. The charge-passage structure has a central region sandwiched between first and second regions. The central region has a lower probability of trapping charges and/or a lower rate of trapping charges than the first and second regions. Some embodiments include an integrated structure having a vertical stack of alternating conductive levels and insulative levels, and having a charge-passage structure extending vertically along the vertical stack. Some embodiments include a NAN D memory array having a vertical stack of alternating insulative levels and wordline levels, and having a charge-passage structure extending vertically along the vertical stack.