Nano-Column Light Emitting Device Mask Trapping Excess Material
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Solution Overview
Problem
In light emitting devices using nano-columns as a light source, excessive raw material migration can lead to oversized nano-columns, resulting in decreased light emission efficiency and incorrect wavelength emission due to adjacent columns contacting each other.
Innovation Solution
A method of manufacturing light emitting devices involves providing a mask layer with specific openings and structures on a substrate, where the second opening is annular and surrounds the first openings, allowing the substrate to trap excess raw material and prevent columnar parts from becoming too large, thereby maintaining efficient light emission and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the amount of raw material migrating on the mask pattern is increased, then the nano-columns can be formed, but the nano-columns become huge and adjacent columns contact each other, decreasing light emission efficiency
Solution Approach 1:
The patent extracts the excess raw material that would otherwise migrate and cause nano-column overgrowth by introducing a dedicated trapping region. This region is formed by making the mask pattern's outer peripheral surface protrude beyond the outer peripheral surface of the nano-column formation region, creating a physical barrier that captures migrating raw material before it can reach the nano-columns.
Solution Approach 2:
The mask pattern's outer peripheral surface acts as an intermediary structure between the raw material source and the nano-columns. This intermediate region serves as a buffer zone that intercepts and retains excess raw material, preventing it from directly contacting and causing overgrowth of the nano-columns.
2Ease of manufacture
If the nano-columns are allowed to grow freely, then they can be formed, but they become oversized and contact adjacent columns, resulting in decreased light emission efficiency and incorrect wavelength emission
Solution Approach 1:
The patent removes the harmful effect of excess raw material migration by extracting it into a dedicated trapping region. The mask pattern's protruding outer peripheral surface captures and isolates the excess raw material, preventing it from interfering with nano-column growth and maintaining proper column separation for reliable light emission.
Solution Approach 2:
The patent applies preliminary anti-action by pre-configuring the mask pattern with a protruding outer peripheral surface that anticipates and counteracts the harmful migration of raw material. This structural feature is built in advance to prevent the very problem of raw material migration before it can affect nano-column formation and growth.
3Productivity
If the raw material migration is not controlled, then the nano-columns can be formed quickly, but the excessive raw material causes significant decrease in light emission efficiency and maximum light output
Solution Approach 1:
The patent extracts excess raw material into a dedicated trapping region formed by the protruding mask pattern. This allows rapid nano-column formation to proceed without the harmful side effect of raw material over-accumulation, maintaining both high productivity and high light output by preventing column overgrowth and contact.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents columnar parts from becoming oversized, improves light emission efficiency, and ensures uniform light output by trapping excess raw material, enhancing the yield and performance of the light emitting device.
Implementation Method 1
there is described the fact that nano-columns are grown from the semiconductor substrate toward an area above a mask pattern via a plurality of openings using an MOCVD (Metal Organic Chemical Vapor Deposition) method
Implementation Method 2
there is described the fact that nano-columns are grown from the semiconductor substrate toward an area above a mask pattern via a plurality of openings using an MOCVD (Metal Organic Chemical Vapor Deposition) method, an MBE (Molecular Beam Epitaxy) method
Implementation Method 3
the second opening may be provided with an annular shape, and the plurality of first openings may be formed inside the second opening when viewed from a thickness direction of the substrate
Data Source
AI summary
A method of manufacturing a light source device includes the steps of providing a mask layer to a substrate, providing the mask layer with a plurality of first openings and at least one second opening, and growing columnar parts having a light emitting section from the plurality of first openings, and growing a structure from the second opening.